Browsing by imec author "588f3e4029b46978348279bdc8cc25d62ceba1e7"
Now showing items 21-40 of 54
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Forksheet FETs with Bottom Dielectric Isolation, Self-Aligned Gate Cut, and Isolation between Adjacent Source-Drain Structures
Mertens, Hans; Ritzenthaler, Romain; Oniki, Yusuke; Puttarame Gowda, Pallavi; Mannaert, Geert; Sebaai, Farid; Hikavyy, Andriy; Rosseel, Erik; Dupuy, Emmanuel; Peter, Antony; Vandersmissen, Kevin; Radisic, Dunja; Briggs, Basoene; Batuk, Dmitry; Geypen, Jef; Martinez Alanis, Gerardo Tadeo; Seidel, Felix; Richard, Olivier; Chan, BT; Mitard, Jerome; Dentoni Litta, Eugenio; Horiguchi, Naoto (2022) -
High yield and process uniformity for 300 mm integrated WS2 FETs
Schram, Tom; Smets, Quentin; Radisic, Dunja; Groven, Benjamin; Thiam, Arame; Li, Waikin; Dupuy, Emmanuel; Vandersmissen, Kevin; Maurice, Thibaut; Asselberghs, Inge; Radu, Iuliana (2021) -
High-throughput magnetic metrology for spintronic CMOS integration
Yan, Jingdong; Manfrini, Mauricio; Radisic, Dunja; Ciubotaru, Florin; Wilson, Chris; Radu, Iuliana; Thean, Aaron (2016) -
In-line control of Si loss after post ion implantation strip
Shamiryan, Denis; Radisic, Dunja; Boullart, Werner (2009) -
In-line control of Si loss after post ion implantation strip
Shamiryan, Denis; Radisic, Dunja; Boullart, Werner (2010) -
Insights into Scaled Logic Devices Connected from Both Wafer Sides
Veloso, Anabela; Eneman, Geert; Matagne, Philippe; Vermeersch, Bjorn; Jourdain, Anne; Arimura, Hiroaki; O'Sullivan, Barry; Chen, Rongmei; De Keersgieter, An; Simoen, Eddy; Radisic, Dunja; Oniki, Yusuke; Lafitte, A.; Brus, Stephan; Beyne, Eric; Dentoni Litta, Eugenio; Horiguchi, Naoto (2022) -
Integration challenges of spin torque majority gatelogic
Wilson, Chris; Manfrini, Mauricio; Thiam, Arame; Souriau, Laurent; Babaei Gavan, Khashayar; Rassoul, Nouredine; Radisic, Dunja; Vaysset, Adrien; Trivkovic, Darko; Ercken, Monique; Swerts, Johan; Briggs, Basoene; Sayan, Safak; Radu, Iuliana; Mocuta, Dan (2016) -
Interconnected magnetic tunnel junctions for spin-logic applications
Manfrini, Mauricio; Vaysset, Adrien; Wan, Danny; Raymenants, Eline; Swerts, Johan; Rao, Siddharth; Zografos, Odysseas; Souriau, Laurent; Babaei Gavan, Khashayar; Rassoul, Nouredine; Radisic, Dunja; Cupak, Miroslav; Dehan, Morin; Sayan, Safak; Nikonov, Dmitry E.; Manipatruni, Sasikanth; Young, Ian A.; Mocuta, Dan; Radu, Iuliana (2018) -
Interconnected MTJs driven by STT for spin-logic applications
Manfrini, Mauricio; Vaysset, Adrien; Wan, Danny; Raymenants, Eline; Swerts, Johan; Rao, Siddharth; Souriau, Laurent; Babaei Gavan, Khashayar; Rassoul, Nouredine; Radisic, Dunja; Cupak, Miroslav; Dehan, M; Sayan, S; Nikonov, D.E.; Manipatruni, S; Young, I. A.; Mocuta, Dan; Radu, Iuliana (2017) -
Interconnects scaling challenge for sub-20nm spin torque transfer magnetic random access memory technology
Min, Tai; Tokei, Zsolt; Kar, Gouri Sankar; Cosemans, Stefan; Bekaert, Joost; Raghavan, Praveen; Cornelissen, Sven; Xu, Kaidong; Souriau, Laurent; Radisic, Dunja; Swerts, Johan; Tahmasebi, Taiebeh; Mertens, Sofie (2014) -
Lateral versus interdigitated diode design for 10 Gb/s Low-voltage low-loss silicon ring modulators
Pantouvaki, Marianna; Yu, Hui; Verheyen, Peter; Lepage, Guy; Bogaerts, Wim; Moelants, Myriam; Wouters, Johan M. D.; Radisic, Dunja; Vandervorst, Alain; Absil, Philippe; Van Campenhout, Joris (2012) -
Magnetic tunnel junctions etch and encapsulation process optimization for high-density STT-MRAM applications
Souriau, Laurent; Radisic, Dunja; Kundu, Shreya; Paraschiv, Vasile; Yamashita, Fumiko; Fujimoto, Kiwamu; Tahara, Shigeru; Maeda, K.; Kim, Woojin; Rao, Siddharth; Donadio, Gabriele Luca; Crotti, Davide; Tsvetanova, Diana; Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Piumi, Daniele; Kar, Gouri Sankar; Furnemont, Arnaud (2016) -
Metrology for implanted Si substrate and dopant loss studies
Radisic, Dunja; Shamiryan, Denis; Mannaert, Geert; Boullart, Werner; Rosseel, Erik; Bogdanowicz, Janusz; Goossens, Jozefien; Marrant, Koen; Bender, Hugo; Sonnemans, Roger; Berry, Ivan (2009) -
Metrology for implanted Si substrate and dopant loss studies
Radisic, Dunja; Shamiryan, Denis; Mannaert, Geert; Boullart, Werner; Rosseel, Erik; Bogdanowicz, Janusz; Goossens, Jozefien; Marrant, Koen; Bender, Hugo (2009) -
Metrology for implanted Si substrate loss studies
Radisic, Dunja; Shamiryan, Denis; Mannaert, Geert; Boullart, Werner; Rosseel, Erik; Bogdanowicz, Janusz; Goossens, Jozefien; Marrant, Koen; Bender, Hugo; Sonnemans, Roger; Berry, Ivan (2010) -
Middle-of-line plasma dry etch challenges for Buried Power Rail integration
Radisic, Dunja; Veloso, Anabela; Gupta, Anshul; Hosseini, Maryam; Wang, Shiwei; Mertens, Hans; Chan, BT; Batuk, Dmitry; Martinez Alanis, Gerardo Tadeo; Lazzarino, Frederic; Dentoni Litta, Eugenio; Horiguchi, Naoto (2022) -
Non-oxidizing solvent-based strip of ion implanted photoresist
Tsvetanova, Diana; Vos, Rita; Vanstreels, Kris; Radisic, Dunja; Sonnemans, Roger; Berry, Ivan; Waldfried, Carlo; Mattson, David; DeLuca, J; Vereecke, Guy; Mertens, Paul; Parac-Vogt, Tatjana; Heyns, Marc (2012) -
Pedestal collector optimization for high speed SiGe:C HBT
Van Huylenbroeck, Stefaan; Sibaja-Hernandez, Arturo; Venegas, Rafael; You, Shuzhen; Vleugels, Frank; Radisic, Dunja; Lee, Willie; Vanherle, Wendy; De Meyer, Kristin; Decoutere, Stefaan (2011) -
Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)
Radisic, Dunja; Demand, Marc; Chan, Shihsheng; Demuynck, Steven; Kumar, Kaushik; Metz, Andrew; Teugels, Lieve; Sun, Junling; Smith, Jeffrey; Sebaai, Farid; Hopf, Toby; Altamirano Sanchez, Efrain (2019) -
Plasma impact on the HfO2 high-k dielectric: Continuous-Wave plasma etch versus Quasi-Atomic Layer etch
Radisic, Dunja; Smets, Quentin; Schram, Tom (2021)