Browsing by imec author "6429a5265f53aca94b30037f40e271aed453f65f"
Now showing items 21-40 of 59
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Dummy oxide removal in high-K last process integration how to avoid silicon corrosion issue
Sebaai, Farid; Veloso, Anabela; Takahashi,; Pacco, Antoine; Claes, Martine; Schaekers, Marc; De Gendt, Stefan; Mertens, Paul; Struyf, Herbert (2013) -
Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process
Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Ogawa, Yuichi; Wostyn, Kurt; Pacco, Antoine; Yoshida, Yukifuni; Holsteyns, Frank (2016) -
Effects of interfacial strength and dimension of structures on physical cleaning window
Kim, Tae-Gon; Pacco, Antoine; Wostyn, Kurt; Xu, XiuMei; Struyf, Herbert; Arstila, Kai; Park, Jin-Goo; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (2010) -
Electrical evaluation of stiction during drying of high aspect ratio nanostructures
Pacco, Antoine; Wada, M. (2008) -
Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
Pacco, Antoine; Nakano, Teppei; Iwahata, Shota; Iwasaki, Akihisa; Altamirano Sanchez, Efrain (2023) -
Fabrication and room temperature characterization of trilayer junctions for the development of 300 mm compatible superconducting qubits
Wan, Danny; Couet, Sebastien; Piao, Xiaoyu; Souriau, Laurent; Tsvetanova, Diana; Vangoidsenhoven, Diziana; Thiam, Arame; Pacco, Antoine; Potocnik, Anton; Mongillo, Massimo; Ivanov, Tsvetan; Jussot, Julien; Verjauw, Jeroen; Acharya, Rohith; Heijlen, Jeroen; Donadio, Gabriele Luca; Govoreanu, Bogdan; Lazzarino, Frederic; Radu, Iuliana (2020) -
Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers
Wan, Danny; Couet, Sebastien; Piao, Xiaoyu; Souriau, Laurent; Canvel, Yann; Tsvetanova, Diana; Vangoidsenhoven, Diziana; Thiam, Arame; Pacco, Antoine; Potocnik, Anton; Mongillo, Massimo; Ivanov, Tsvetan; Jussot, Julien; Verjauw, Jeroen; Acharya, Rohith; Lazzarino, Frederic; Govoreanu, Bogdan; Radu, Iuliana (2021) -
Fabrication of superconducting resonators in a 300 mm pilot line for quantum technologies
Wan, Danny; Swerts, Johan; Souriau, Laurent; Burnett, Jonathan; Piao, Xiaoyu; Mongillo, Massimo; Verjauw, Jeroen; Potocnik, Anton; Thiam, Arame; Jussot, Julien; Vangoidsenhoven, Diziana; Pacco, Antoine; Kudra, Marina; Niepce, David; Ivanov, Tsvetan; Boccardi, Guillaume; Mocuta, Dan; Bylander, Jonas; Radu, Iuliana (2019) -
Focus spot reduction by brush scrubber cleaning
Pacco, Antoine; Kesters, Els; Simms, Ihsan; Nafus, Kathleen; Vandereyken, Jelle; Yonekawa, Hiroki (2014) -
Galvanic corrosion of PN junctions during the dielectric removal with HF for RMG transistors
Pacco, Antoine; Sebaai, Farid; Suhard, Samuel; Struyf, Herbert; De Gendt, Stefan; Vos, Rita; Veloso, Anabela; Mertens, Paul (2011-10) -
High-Performance 300mm Integrated Superconducting Resonators for Quantum Computing Applications
Mongillo, Massimo; Potocnik, Anton; Verjauw, Jeroen; Mohiyaddin, Fahd Ayyalil; Ivanov, Tsvetan; Acharya, Rohith; Piao, Xiaoyu; Perez Lozano, Daniel; Wan, Danny; Pacco, Antoine; Jussot, Julien; Souriau, Laurent; Ananthapadmanabha Rao, Vadiraj; Swerts, Johan; Couet, Sebastien; Goux, Ludovic; Govoreanu, Bogdan; Radu, Iuliana (2021) -
Impact of acoustical reflections on megasonic cleaning performance
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Halder, Sandip; Zijlstra, Aaldert; Doumen, Geert; Bearda, Twan; Mertens, Paul (2009) -
Impact of acoustical reflections on megasonic cleaning performance
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Halder, Sandip; Zijlstra, Aaldert; Doumen, Geert; Bearda, Twan; Mertens, Paul (2009) -
Impact of hydrogen peroxide in ultrapure water
Ogawa, Yuichi; Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Minato, Yasuharu; Miyazaki, Yoichi; Wostyn, Kurt; Pacco, Antoine; Holsteyns, Frank; Yoshida, Yukifumi (2017) -
Influence of dissolved CO2 on bubble activity in pulsed acoustic fields
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Struyf, Herbert; Heyns, Marc; Mertens, Paul; De Gendt, Stefan; Gottschalk, Christiane (2013) -
Influence of surface tension on cavitation noise spectra and particle removal efficiency in high frequency ultrasound fields
Camerotto, Elisabeth; Brems, Steven; Hauptmann, Marc; Pacco, Antoine; Struyf, Herbert; Mertens, Paul; De Gendt, Stefan (2012) -
Investigation of Microwave Loss Induced by Oxide Regrowth in High-Q Niobium Resonators
Verjauw, Jeroen; Potocnik, Anton; Mongillo, Massimo; Acharya, Rohith; Mohiyaddin, Fahd Ayyalil; Simion, George; Pacco, Antoine; Ivanov, Tsvetan; Wan, Danny; Vanleenhove, Anja; Souriau, Laurent; Jussot, Julien; Thiam, Arame; Swerts, Johan; Piao, Xiaoyu; Couet, Sebastien; Heyns, Marc; Govoreanu, Bogdan; Radu, Iuliana (2021) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008)