Browsing by author "Shamiryan, Denis"
Now showing items 21-40 of 137
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Controlling STI-related parasitic conduction in 90nm CMOS and below
Augendre, Emmanuel; Rooyackers, Rita; Shamiryan, Denis; Ravit, Claire; Jurczak, Gosia; Badenes, Gonçal (2002) -
Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
Abell, Thomas; Shamiryan, Denis; Patz, Matthias; Maex, Karen (2003) -
Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
Abell, Thomas; Shamiryan, Denis; Patz, Matthias; Maex, Karen (2004) -
Demonstration of Ni fully GermanoSilicide as a pFET gate electrode candidate on HfSiON
Yu, HongYu; Singanamalla, Raghunath; Opsomer, Karl; Augendre, Emmanuel; Simoen, Eddy; Kittl, Jorge; Kubicek, Stefan; Severi, Simone; Shi, Xiaoping; Brus, Stephan; Zhao, Chao; de Marneffe, Jean-Francois; Locorotondo, Sabrina; Shamiryan, Denis; Van Dal, Mark; Veloso, Anabela; Lauwers, Anne; Niwa, Masaaki; Maex, Karen; De Meyer, Kristin; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005) -
Demonstration of recessed SiGe S/D and inserted metal gate on HfO2 for high performance pFETs
Verheyen, Peter; Eneman, Geert; Rooyackers, Rita; Loo, Roger; Eeckhout, Lieve; Rondas, Dirk; Leys, Frederik; Snow, Jim; Shamiryan, Denis; Demand, Marc; Hoffmann, Thomas Y.; Goodwin, Michael; Fujimoto, Hiromasa; Ravit, Claire; Lee, Byeong Chan; Caymax, Matty; De Meyer, Kristin; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005-12) -
Development of 2-step plasma texturing process for crystalline silicon solar cells with Linear Microwave Plasma Sources (LPS)
Chan, BT; Kunnen, Eddy; Shamiryan, Denis; Xu, Kaidong; Boullart, Werner (2011) -
Diffusion barrier integrity evaluation by ellipsometric ellipsometry
Shamiryan, Denis; Baklanov, Mikhaïl; Maex, Karen (2003) -
Diffusion of solvents in thin porous films
Shamiryan, Denis; Baklanov, Mikhaïl; Lyons, Philip; Beckx, Stephan; Boullart, Werner; Maex, Karen (2007) -
Dry etch of bulk Si FinFET structures with tunable CD
Devriendt, Katia; Redolfi, Augusto; Shamiryan, Denis; Boullart, Werner (2009) -
Dry etch of Yb-doped poly-Si gates for low Vt FUSI devices
Demand, Marc; Paraschiv, Vasile; Shamiryan, Denis; Vrancken, Christa; Brus, Stephan; Veloso, Anabela; Boullart, Werner (2007) -
Dry etch processing of Multiple Gate FETs with metal gate electrode
Demand, Marc; Paraschiv, Vasile; Shamiryan, Denis; Beckx, Stephan; Boullart, Werner; Vanhaelemeersch, Serge (2005) -
Dry etching process for bulk finFET manufacturing
Shamiryan, Denis; Redolfi, Augusto; Boullart, Werner (2009) -
Effect of energetic ions on plasma damage of SiCOH low-k material
Kunnen, Eddy; Urbanowicz, Adam; Franquet, Alexis; Shamiryan, Denis; Struyf, Herbert; Boullart, Werner; Baklanov, Mikhaïl (2009) -
Effect of energetic ions on plasma damage of SiCOH low-k material
Kunnen, Eddy; Baklanov, Mikhaïl; Franquet, Alexis; Shamiryan, Denis; Rakhimova, Tatyana; Urbanowicz, Adam; Struyf, Herbert; Boullart, Werner (2010) -
Effect of helium plasma on low-k damage during dry resist strip
Urbanowicz, Adam; Shamiryan, Denis; Kim, Dongchan; Baklanov, Mikhaïl (2007) -
Effect of HF solution on the porous structure of low-k SICOH film
Shamiryan, Denis; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2000) -
Effect of porogen residue on chemical, optical, and mechanical properties of CVD SiCOH low-k materials
Urbanowicz, Adam; Vanstreels, Kris; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2009) -
Effect of quartz window temperature on plasma composition during STI etch
Danilkin, Evgeny; Shamiryan, Denis; Baklanov, Mikhaïl; Milenin, Alexey; Boullart, Werner; Krasnikov, G.; Gutschin, O; Mochalov, A (2008) -
Effect of top power on a low-k film during oxygen strip in a TCP chamber
Kunnen, Eddy; Rakhimova, Tatyana; Shamiryan, Denis; Struyf, Herbert; Boullart, Werner; Baklanov, Mikhaïl (2010) -
Effect of top power on low-k damage during oxygen strip in a TCP etch chamber
Kunnen, Eddy; Shamiryan, Denis; Struyf, Herbert; Boullart, Werner; Baklanov, Mikhaïl (2009)