Browsing by author "Nuytten, Thomas"
Now showing items 41-60 of 80
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Lloyd's Mirror Interference Lithography Below a 22-nm Pitch with an Accessible, Table-top, 13.5 nm High-Harmonic EUV Source
Dorney, Kevin; Castellanos, Sonia; Witting Larsen, Esben; Holzmeier, Fabian; Singh, Dhirendra Pratap; Vandenbroeck, Nadia; De Simone, Danilo; De Schepper, Peter; Vaglio Pret, Alessandro; Bargsten, Clayton; Cousin, Seth; Raymondson, Daisy; Rinard, Eric; Ward, Rod; Kapteyn, Henry; Nuytten, Thomas; van der Heide, Paul; Petersen, John (2021) -
Local arrangement of substitutional C atoms and the thermal stability of epitaxial Si:C(P) grown by CVD
Dhayalan, Sathish Kumar; Nuytten, Thomas; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Vandervorst, Wilfried (2017-11) -
Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: Impact of reducing agents
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; De Gendt, Stefan; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015) -
Material studies on Si:C and Si:CP epitaxial films grown using disilane, monomethylsilane and phosphine
Dhayalan, Sathish Kumar; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Nuytten, Thomas; Richard, Olivier; Bender, Hugo; Douhard, Bastien; Vandervorst, Wilfried (2014) -
Material studies on Si:C epitaxial films grown by CVD
Dhayalan, Sathish Kumar; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Nuytten, Thomas; Richard, Olivier; Bender, Hugo; Douhard, Bastien; Vandervorst, Wilfried (2014-10) -
Metal induced charge transfer doping in graphene-ruthenium hybrid interconnects
Achra, Swati; Wu, Xiangyu; Trepalin, Vadim; Nuytten, Thomas; Ludwig, Jonathan; Afanas'ev, Valeri; Brems, Steven; Soree, Bart; Tokei, Zsolt; Heyns, Marc; Asselberghs, Inge (2021) -
Monolayer controlled deposition of 2D transition metal dichalcogenides on large area substrates
Delabie, Annelies; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Caymax, Matty; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015) -
MoS2 synthesis by Gas Source MBE for transition metal dichalcogenides integration on large scale substrates
El Kazzi, Salim; Mortelmans, Wouter; Nuytten, Thomas; Meersschaut, Johan; Carolan, Patrick; Landeloos, Lien; Conard, Thierry; Radu, Iuliana; Heyns, Marc; Merckling, Clement (2018) -
Multilayer MoS2 growth by metal and metal oxide sulfurization
Heyne, Markus; Chiappe, Daniele; Meersschaut, Johan; Nuytten, Thomas; Conard, Thierry; Richard, Olivier; Bender, Hugo; Moussa, Alain; Huyghebaert, Cedric; Radu, Iuliana; Caymax, Matty; de Marneffe, Jean-Francois; Neyts, Erik C.; De Gendt, Stefan (2016-01) -
Nanofocusing of light into semiconducting fin photonic crystals
Bogdanowicz, Janusz; Nuytten, Thomas; Gawlik, Andrzej; Schulze, Andreas; De Wolf, Ingrid; Vandervorst, Wilfried (2016) -
Nanoscale stress measurements through advanced Raman spectroscopy
Nuytten, Thomas; Bogdanowicz, Janusz; Hantschel, Thomas; Schulze, Andreas; Favia, Paola; Bender, Hugo; De Wolf, Ingrid; Vandervorst, Wilfried (2017) -
Nanoscale stress measurements using Raman spectroscopy
Nuytten, Thomas (2018) -
Nucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2
Zhang, Haodong; Chiappe, Daniele; Meersschaut, Johan; Conard, Thierry; Franquet, Alexis; Nuytten, Thomas; Mannarino, Manuel; Radu, Iuliana; Vandervorst, Wilfried; Delabie, Annelies (2017) -
Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
Groven, Benjamin; Nalin Mehta, Ankit; Bender, Hugo; Smets, Quentin; Meersschaut, Johan; Franquet, Alexis; Conard, Thierry; Nuytten, Thomas; Verdonck, Patrick; Vandervorst, Wilfried; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies (2018) -
Off-axis Raman spectroscopy for nanoscale stress metrology
Khan, Zoheb; Nuytten, Thomas; Favia, Paola; Fleischmann, Claudia; De Wolf, Ingrid; Vandervorst, Wilfried (2022) -
On the local conductivity of individual diamond seeds and their impact on the interfacial resistance of boron-doped diamond films
Tsigkourakos, Menelaos; Hantschel, Thomas; Simon, Daniel; Nuytten, Thomas; Verhulst, Anne; Douhard, Bastien; Vandervorst, Wilfried (2014) -
Overcoated diamond tips for nanometer-scale semiconductor device characterization
Hantschel, Thomas; Tsigkourakos, Menelaos; Kluge, Julia; Werner, Thilo; Zha, Lichen; Paredis, Kristof; Eyben, Pierre; Nuytten, Thomas; Xu, Blair; Vandervorst, Wilfried (2015) -
Overview of scalable transfer approaches to enable epitaxial 2D material integration
Brems, Steven; Ghosh, Souvik; Smets, Quentin; Boulon, Marie-Emmanuelle; Boelen, Andries; Kennes, Koen; Tsai, Hung-Chieh; Chancerel, Francois; Merckling, Clement; Wyndaele, Pieter-Jan; de Marneffe, Jean-Francois; Schram, Tom; Kumar, Pawan; Sergeant, Stefanie; Nuytten, Thomas; De Gendt, Stefan; Medina Silva, Henry; Groven, Benjamin; Morin, Pierre; Kar, Gouri Sankar; Lockhart de la Rosa, Cesar Javier; Yudistira, Didit; Van Campenhout, Joris; Asselberghs, Inge; Phommahaxay, Alain (2023) -
Peculiar alignment and strain behavior of 2D WSe2 monolayers grown by van der Waals epitaxy on engineered sapphire surfaces
Mortelmans, Wouter; El Kazzi, Salim; Nalin Mehta, Ankit; Vanhaeren, Danielle; Conard, Thierry; Meersschaut, Johan; Nuytten, Thomas; De Gendt, Stefan; Heyns, Marc; Merckling, Clement (2019) -
Plasma Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2S and H2 plasma
Groven, Benjamin; Heyne, Markus; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Richard, Olivier; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies (2016)