Browsing by author "Vandervorst, Wilfried"
Now showing items 41-60 of 1434
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(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers
Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004) -
Accuracy in APT analysis: The case of boron in silicon
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Vandervorst, Wilfried (2017) -
Accurate carrier profiling of n-type GaAs junctions
Clarysse, Trudo; Brammertz, Guy; Vanhaeren, Danielle; Eyben, Pierre; Goossens, Jozefien; Clemente, Francesca; Meuris, Marc; Vandervorst, Wilfried; Srnanek, Rudolf; Kinder, Rudolf; Sciana, B.; Radziewicz, D.; Li, Zhiqiang (2008) -
Accurate determination of Si sputter yield in the transient region
Deleu, Jeroen; Brijs, Bert; Vandervorst, Wilfried (1999) -
Accurate electrical activation characterization of CMOS ultra-shallow profiles
Clarysse, Trudo; Dortu, Fabian; Vanhaeren, Danielle; Hoflijk, Ilse; Geenen, Luc; Janssens, Tom; Loo, Roger; Vandervorst, Wilfried; Pawlak, Bartek; Ouzeaud, V.; Defranoux, C.; Faifer, V.N.; Current, M.I. (2004) -
Accurate micro Hall effect measurement on scribe line pads
Osterberg, Frederik; Petersen, Dirch; Wang, Fei; Rosseel, Erik; Vandervorst, Wilfried; Hansen, Ole (2009) -
Accurate prediction of device performance : Reconstructing 2D-active dopant profiles from 2D-carrier profiles in the presence of extensive mobile carrier diffusion
Nazir, Aftab; Eyben, Pierre; Clarysse, Trudo; Spessot, Alessio; Ritzenthaler, Romain; Schram, Tom; Vandervorst, Wilfried (2014) -
Accurate prediction of device performance based on 2-D carrier profiles in the presence of extensive mobile carrier diffusion
Nazir, Aftab; Spessot, Alessio; Eyben, Pierre; Clarysse, Trudo; Ritzenthaler, Romain; Schram, Tom; Vandervorst, Wilfried (2014) -
Accurate stoichiometric analysis of Al1 xGaxN/GaN structures using APT and the influence of laser, poles and zone lines
Morris, Richard; Arnoldi, Laurent; Cuduvally, Ramya; Melkonyan, Davit; Fleischmann, Claudia; Zhao, Ming; Vandervorst, Wilfried (2017) -
Achieving reproducible data: examples from surface analysis in semiconductor technology
Conard, Thierry; van der Heide, Paul; Vanleenhove, Anja; Zborowski, Charlotte; Vandervorst, Wilfried (2019) -
Active dopant characterization methodology for Germanium
Clarysse, Trudo; Eyben, Pierre; Janssens, Tom; Hoflijk, Ilse; Vanhaeren, Danielle; Satta, Alessandra; Meuris, Marc; Vandervorst, Wilfried (2005) -
Active dopant profiling of advanced semiconductor devices using scanning spreading resistance microscopy
Mody, Jay; Eyben, Pierre; Polspoel, Wouter; Schulze, Andreas; Nazir, Aftab; Vandervorst, Wilfried (2008) -
Active laser characterization by scanning capacitance microscopy
Xu, Mingwei; Duhayon, Natasja; Vandervorst, Wilfried (2002) -
Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool
Spampinato, Valentina; Dialameh, Masoud; Fleischmann, Claudia; Franquet, Alexis; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Advanced 2D/3D simulations for laser annealed device using an atomic kinetic monte carlo approach and scanning spreading resistance microscopy (SRRM)
Noda, T.; Eyben, Pierre; Vandervorst, Wilfried; Vrancken, Christa; Rosseel, Erik; Ortolland, Claude; Clarysse, Trudo; Goossens, Jozefien; De Keersgieter, An; Felch, S.; Schreutelkamp, Rob; Absil, Philippe; Jurczak, Gosia; De Meyer, Kristin; Biesemans, Serge; Hoffmann, Thomas Y. (2008) -
Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography
Kundu, Paromita; Fleischmann, Claudia; Van Marcke, Patricia; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; van der Heide, Paul (2018) -
Advanced capabilities and applications of a sputter-RBS system
Brijs, Bert; Deleu, Jeroen; Beyer, Gerald; Vandervorst, Wilfried (1999) -
Advanced capabilities and applications of a sputter-RBS system
Brijs, Bert; Deleu, Jeroen; Beyer, Gerald; Vandervorst, Wilfried (1998) -
Advanced carrier depth profiling on Si and Ge with M4PP
Clarysse, Trudo; Eyben, Pierre; Parmentier, Brigitte; Van Daele, Benny; Satta, Alessandra; Vandervorst, Wilfried; Lin, Rong; Petersen, Dirch; Folmer Nielsen, Peter (2007) -
Advanced carrier depth profiling on Si and Ge with micro four-point probe
Clarysse, Trudo; Eyben, Pierre; Parmentier, Brigitte; Van Daele, Benny; Satta, Alessandra; Vandervorst, Wilfried; Lin, Rong; Petersen, Dirch H.; Folmer Nielsen, Peter (2008)