Browsing imec Publications by author "Wada, Masayuki"
Now showing items 21-30 of 30
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Multiple-Vt FinFET devices through La2O3 dielectric capping
Witters, Liesbeth; Veloso, Anabela; Ferain, Isabelle; Demand, Marc; Collaert, Nadine; Son, Nak Jin; Adelmann, Christoph; Meersschaut, Johan; Vos, Rita; Rohr, Erika; Wada, Masayuki; Schram, Tom; Kubicek, Stefan; De Meyer, Kristin; Biesemans, Serge; Jurczak, Gosia (2008) -
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
Wada, Masayuki; Vos, Rita; Claes, Martine; Schram, Tom; Snow, J.; Mertens, Paul; Eitoku, A. (2009) -
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
Wada, Masayuki; Vos, Rita; Claes, Martine; Schram, Tom; Snow, J.; Mertens, Paul; Eitoku, Atsuro (2009) -
Particle removal and damage thresholds from particle removal and damage formation frequency for high-velocity-aerosol cleaning
Wostyn, Kurt; Wada, Masayuki; Andreas, M.; Kenis, Karine; Roussel, Philippe; Bearda, Twan; Leunissen, Peter; Mertens, Paul (2009) -
Single-metal dual-dielectric (SMDD) gate-first CMOS integration towards low VT and high performance
Ragnarsson, Lars-Ake; Schram, Tom; Rohr, Erika; Sebaai, Farid; Kelkar, Prasad; Wada, Masayuki; Kauerauf, Thomas; Aoulaiche, Marc; Cho, Moon Ju; Kubicek, Stefan; Lauwers, Anne; Hoffmann, Thomas Y.; Absil, Philippe; Biesemans, Serge (2009) -
Spray systems for cleaning during semiconductor manufacturing
Wostyn, Kurt; Wada, Masayuki; Sano, Ken-Ichi; Andreas, Michael; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul (2008) -
Tackling the challenges of physical cleaning
Wostyn, Kurt; Janssens, Tom; Zijlstra, Aaldert; Wada, Masayuki; Andreas, Michael; Kim, Tae-Gon; Bearda, Twan; Leunissen, Peter; Park, Jin-Goo; Mertens, Paul (2008) -
Uniformity of particle removal by aerosol spray
Xu, XiuMei; Pacco, Antoine; Wada, Masayuki; Leunissen, Peter; Struyf, Herbert; Mertens, Paul (2010) -
Use of surface haze for evaluation of photoresist residue removal efficiency
Halder, Sandip; Vos, Rita; Wada, Masayuki; Kenis, Karine; Bearda, Twan; Radovanovic, Sanda; Dighe, Prasanna; Leunissen, Peter; Mertens, Paul (2009) -
Using the background signal of a light scattering tool for I/I photo resist strip optimization and monitoring
Halder, Sandip; Vos, Rita; Wada, Masayuki; Claes, Martine; Kenis, Karine; Mertens, Paul; Dighe, Prasanna; Radovanovic, Sanda; Simpson, Gavin; Sonnemans, Roger (2010)