Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling contrast imaging

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Authors
Schulze, Andreas; Han, Han; Strykos, Libor; Vystavel, Thomas; Porret, Clément; Loo, Roger; Caymax, Matty
Conference
ECS AiMES 2018 Meeting
Title
Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling contrast imaging
Publication type
Meeting abstract
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