Browsing Conference contributions by imec author "6429a5265f53aca94b30037f40e271aed453f65f"
Now showing items 21-40 of 42
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Electrical evaluation of stiction during drying of high aspect ratio nanostructures
Pacco, Antoine; Wada, M. (2008) -
Fabrication and room temperature characterization of trilayer junctions for the development of 300 mm compatible superconducting qubits
Wan, Danny; Couet, Sebastien; Piao, Xiaoyu; Souriau, Laurent; Tsvetanova, Diana; Vangoidsenhoven, Diziana; Thiam, Arame; Pacco, Antoine; Potocnik, Anton; Mongillo, Massimo; Ivanov, Tsvetan; Jussot, Julien; Verjauw, Jeroen; Acharya, Rohith; Heijlen, Jeroen; Donadio, Gabriele Luca; Govoreanu, Bogdan; Lazzarino, Frederic; Radu, Iuliana (2020) -
Fabrication of superconducting resonators in a 300 mm pilot line for quantum technologies
Wan, Danny; Swerts, Johan; Souriau, Laurent; Burnett, Jonathan; Piao, Xiaoyu; Mongillo, Massimo; Verjauw, Jeroen; Potocnik, Anton; Thiam, Arame; Jussot, Julien; Vangoidsenhoven, Diziana; Pacco, Antoine; Kudra, Marina; Niepce, David; Ivanov, Tsvetan; Boccardi, Guillaume; Mocuta, Dan; Bylander, Jonas; Radu, Iuliana (2019) -
Focus spot reduction by brush scrubber cleaning
Pacco, Antoine; Kesters, Els; Simms, Ihsan; Nafus, Kathleen; Vandereyken, Jelle; Yonekawa, Hiroki (2014) -
Galvanic corrosion of PN junctions during the dielectric removal with HF for RMG transistors
Pacco, Antoine; Sebaai, Farid; Suhard, Samuel; Struyf, Herbert; De Gendt, Stefan; Vos, Rita; Veloso, Anabela; Mertens, Paul (2011-10) -
High-Performance 300mm Integrated Superconducting Resonators for Quantum Computing Applications
Mongillo, Massimo; Potocnik, Anton; Verjauw, Jeroen; Mohiyaddin, Fahd Ayyalil; Ivanov, Tsvetan; Acharya, Rohith; Piao, Xiaoyu; Perez Lozano, Daniel; Wan, Danny; Pacco, Antoine; Jussot, Julien; Souriau, Laurent; Ananthapadmanabha Rao, Vadiraj; Swerts, Johan; Couet, Sebastien; Goux, Ludovic; Govoreanu, Bogdan; Radu, Iuliana (2021) -
Impact of acoustical reflections on megasonic cleaning performance
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Halder, Sandip; Zijlstra, Aaldert; Doumen, Geert; Bearda, Twan; Mertens, Paul (2009) -
Impact of acoustical reflections on megasonic cleaning performance
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Halder, Sandip; Zijlstra, Aaldert; Doumen, Geert; Bearda, Twan; Mertens, Paul (2009) -
Impact of hydrogen peroxide in ultrapure water
Ogawa, Yuichi; Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Minato, Yasuharu; Miyazaki, Yoichi; Wostyn, Kurt; Pacco, Antoine; Holsteyns, Frank; Yoshida, Yukifumi (2017) -
Influence of dissolved CO2 on bubble activity in pulsed acoustic fields
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Struyf, Herbert; Heyns, Marc; Mertens, Paul; De Gendt, Stefan; Gottschalk, Christiane (2013) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Optimization of EUV reticle cleaning by evaluation of chemistries on wafer-based mimic test structures.
Pacco, Antoine; Dattilo, Davide; Jonckheere, Rik; Rip, Jens; Dietze, Uwe; Kruemberg, Jens; Holsteyns, Frank (2016) -
Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching
Erofeev, Ivan; Mareum Khan, Muhaimin; Aabdin, Zainul; Ray Chowdhuri, Angshuman; Pacco, Antoine; Philipsen, Harold; Holsteyns, Frank; Mirsaidov, Utkur (2023-08) -
Recess metrology challenges for 3D device architectures in advanced technology nodes
Santoro, Gaetano; Houchens, Kevin; Bogdanowicz, Janusz; Elizov, Moshe; Yaron, Lior; Chemama, Michael; Goldenshtein, Alex; Zakay, Amit; Amit, Noam; Briggs, Basoene; Pacco, Antoine; Delhougne, Romain; Cockburn, Andrew; Abramovitz, Yaniv; Tam, Aviram; Adan, Ofer; Mertens, Hans; Charley, Anne-Laure; Horiguchi, Naoto; Leray, Philippe; Lorusso, Gian (2022) -
Replacement metal contact using sacrificial ILD0 for wrap around contact in scaled FinFET technology
Chew, Soon Aik; Demuynck, Steven; Zhang, Liping; Pacco, Antoine; Devriendt, Katia; Teugels, Lieve; Hopf, Toby; Versluijs, Janko; Vrancken, Christa; Dangol, Anish; Altamirano Sanchez, Efrain; Mocuta, Dan; Horiguchi, Naoto (2018) -
Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation
Pacco, Antoine; Holsteyns, Frank; Schaekers, Marc; Everaert, Jean-Luc; Dictus, Dries; Cuypers, Daniel (2018) -
Study of cobalt wet recess for fully self aligned vias in advanced interconnects
Akanishi, Yuya; Pacco, Antoine; Holsteyns, Frank (2019) -
Study of the anisotropic wet etching of nanoscale structures in alkaline solutions
Pacco, Antoine; Aabdin, Zainul; Anand, Utkarsh; Rip, Jens; Mirsaidov, Utkur; Holsteyns, Frank (2018) -
Towards reduced impact of EUV mask defectivity on wafer
Jonckheere, Rik; Van Den Heuvel, Dieter; Pacco, Antoine; Pollentier, Ivan; Baudemprez, Bart; Jehoul, Christiane; Hermans, Jan; Hendrickx, Eric (2014-07)