Browsing Conference contributions by imec author "66d03480a2ffe7a314ebd0805f659b0e18accac4"
Now showing items 21-32 of 32
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Key challenges and opportunities for 3D sequential integration
Vandooren, Anne; Witters, Liesbeth; Franco, Jacopo; Mallik, Arindam; Parvais, Bertrand; Wu, Zhicheng; Li, Waikin; Rosseel, Erik; Hikavyy, Andriy; Peng, Lan; Rassoul, Nouredine; Jamieson, Geraldine; Inoue, Fumihiro; Verbinnen, Greet; Devriendt, Katia; Teugels, Lieve; Heylen, Nancy; Vecchio, Emma; Tao, Zheng; Waldron, Niamh; Boemmels, Juergen; De Heyn, Vincent; Mocuta, Dan; Ryckaert, Julien; Collaert, Nadine (2018-10) -
Patterning challenges for beyond 3nm logic devices: Example of an interconnected magnetic tunnel junction
Thiam, Arame; Wan, Danny; Souriau, Laurent; Babaei Gavan, Khashayar; Rassoul, Nouredine; Swerts, Johan; Couet, Sebastien; Raymenants, Eline; Jussot, Julien; Trivkovic, Darko; Ercken, Monique; Wilson, Chris; Radu, Iuliana (2019) -
Process-induced charging damage in IGZO nTFTs
Hiblot, Gaspard; Rassoul, Nouredine; Teugels, Lieve; Devriendt, Katia; Vaisman Chasin, Adrian; van Setten, Michiel; Belmonte, Attilio; Delhougne, Romain; Kar, Gouri Sankar (2021) -
RIE dynamics for extreme wafer thinning applications
Rassoul, Nouredine; Jourdain, Anne; Tutunjyan, Nina; De Vos, Joeri; Sardo, Stefano; Inoue, Fumihiro; Piumi, Daniele; Miller, Andy; Beyne, Eric; Walsby, Edward; Jash Patel, Patel; Oliver, Ansell; Huma, Ashraf; Janet, Hopkins; Dave, Thomas (2017) -
Sequential 3D: Key integration challenges and opportunities for advanced semiconductor scaling
Vandooren, Anne; Witters, Liesbeth; Franco, Jacopo; Mallik, Arindam; Parvais, Bertrand; Wu, Z.; Walke, Amey; Deshpande, Paru; Rosseel, Erik; Hikavyy, Andriy; Li, Waikin; Peng, L.; Rassoul, Nouredine; Jamieson, Geraldine; Inoue, Fumihiro; Verbinnen, Greet; Devriendt, Katia; Teugels, Lieve; Heylen, Nancy; Vecchio, Emma; Zheng, T.; Waldron, Niamh; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2018) -
Staggered pillar patterning using 0.33NA EUV lithography
De Simone, Danilo; Blanc, Romuald; Van de Kerkhove, Jeroen; Tamaddon, Amir-Hossein; Fallica, Roberto; Van Look, Lieve; Rassoul, Nouredine; Lazzarino, Frederic; Vandenbroeck, Nadia; Vanelderen, Pieter; Lorusso, Gian; Van Roey, Frieda; Charley, Anne-Laure; Vandenberghe, Geert; Ronse, Kurt; Lee, Kilyoung; Lee, Junghyung; Park, Sarohan; Lim, Chang-Moon; Park, Chan-Ha (2019) -
Sub-40mV Sigma-VTH IGZO nFETs in 300mm Fab
Mitard, Jerome; Kljucar, Luka; Rassoul, Nouredine; Dekkers, Harold; van Setten, Michiel; Vaisman Chasin, Adrian; Pourtois, Geoffrey; Belmonte, Attilio; Donadio, Gabriele Luca; Goux, Ludovic; Mao, Ming; Puliyalil, Harinarayanan; Teugels, Lieve; Tsvetanova, Diana; Nag, Manoj; Steudel, Soeren; del Agua Borniquel, Jose Ignacio; Ramalingam, Jothilingam; Delhougne, Romain; Wilson, Chris; Tokei, Zsolt; Kar, Gouri Sankar (2020) -
Subtractive etch of ruthenium for sub-5nm interconnect
Wan, Danny; Paolillo, Sara; Rassoul, Nouredine; Kutrzeba Kotowska, Bogumila; Blanco, Victor; Adelmann, Christoph; Lazzarino, Frederic; Ercken, Monique; Murdoch, Gayle; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt (2018) -
Tailoring IGZO-TFT architecture for capacitorless DRAM, demonstrating > 10(3)s retention, > 10(11) cycles endurance and L-g scalability down to 14nm
Belmonte, Attilio; Oh, Hyungrock; Subhechha, Subhali; Rassoul, Nouredine; Hody, Hubert; Dekkers, Harold; Delhougne, Romain; Ricotti, Lorenzo; Banerjee, Kaustuv; Vaisman Chasin, Adrian; van Setten, Michiel; Puliyalil, Harinarayanan; Pak, Murat; Teugels, Lieve; Tsvetanova, Diana; Vandersmissen, Kevin; Kundu, Shreya; Heijlen, Jeroen; Batuk, Dmitry; Geypen, Jef; Goux, Ludovic; Kar, Gouri Sankar (2021) -
Technology developments in high-resolution FMM-free OLED and BEOL IGZO TFTs for power-efficient microdisplays
Ke, Tung Huei; Glushkova, Anastasia; Sandehang, Calvin Mona; Alvarez, Gema; Vandenplas, Erwin; Mac Ciarnain, Rossa; Malinowski, Pawel; Mitard, Jerome; Rassoul, Nouredine; Belmonte, Attilio; Tokei, Zsolt; Sankar kar, Gouri; Genoe, Jan; Heremans, Paul (2021) -
Tone reversal technology development targeting below 5nm technology node applications
Decoster, Stefan; Lazzarino, Frederic; Piao, Xiaoyu; Feurprier, Yannick; Rassoul, Nouredine; Piumi, Daniele (2017) -
Understanding and modelling the PBTI reliability of thin-film IGZO transistors
Vaisman Chasin, Adrian; Franco, Jacopo; Triantopoulos, Konstantinos; Dekkers, Harold; Rassoul, Nouredine; Belmonte, Attilio; Smets, Quentin; Subhechha, Subhali; Claes, Dieter; van Setten, Michiel; Mitard, Jerome; Delhougne, Romain; Afanasiev, Valeri; Kaczer, Ben; Kar, Gouri Sankar (2021)