EISBN
978-1-5106-4978-1
ISBN
978-1-5106-4977-4
ISSN
0277-786X
Conference
Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference
Journal
SPIE Conference proceedings
Volume
12051
Title
Investigation of Low-n Mask in 0.33NA EUV Single Patterning at Pitch 28nm Metal Design
Publication type
Proceedings paper