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TCAD study of latch-up sensitivity to wafer thinning below 500 nm
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Authors
Hiblot, Gaspard
;
Serbulova, Kateryna
;
Hellings, Geert
;
Chen, Shih-Hung
DOI
10.1109/CAS52836.2021.9604133
EISBN
978-1-6654-3571-0
ISSN
1545-827X
Conference
44th International Semiconductor Conference (CAS)
Journal
na
Title
TCAD study of latch-up sensitivity to wafer thinning below 500 nm
Publication type
Proceedings paper
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3
20.500.12860/40509.3
*
2023-01-19T16:24:31Z
validation by library/open access desk
1
20.500.12860/40509
2022-09-25T02:51:36Z
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