Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications

Thumbnail
View/open
Metadata
Show full item record
Authors
Ghorbani, Leila; Kundu, Shreya; Lazzarino, Frederic; De Gendt, Stefan
DOI
10.1145/3568162.3578633
ISSN
N/A
Conference
MNE2023
Journal
N/A
Title
Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications
Publication type
Meeting abstract
Embargo date
2023-03-31
Collections

Version history

VersionItemDateSummary
220.500.12860/42549.2*2025-06-19T08:31:43Zvalidation by library/open access desk
120.500.12860/425492023-09-15T18:41:07Z

*Selected version