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Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence
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Authors
Bogdanowicz, Janusz
;
Oniki, Yusuke
;
Kenis, Karine
;
Puttarame Gowda, Pallavi
;
Mertens, Hans
;
Shamieh, Basel
;
Leon, Yonatan
;
Wormington, Matthew
;
Van der Meer, Juliette
;
Charley, Anne-Laure
DOI
10.1117/1.JMM.22.3.034001
ISSN
1932-5150
Issue
3
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Volume
22
Title
Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence
Publication type
Journal article
Embargo date
2023-08-02
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2
20.500.12860/43265.2
*
2024-02-27T08:28:52Z
validation by library/open access desk
1
20.500.12860/43265
2023-12-15T17:16:56Z
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