Browsing by author "Wormington, Matthew"
Now showing items 1-9 of 9
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Asymmetric relaxation of SiGe in patterned Si line structures
Wormington, Matthew; Lafford, Tamzin; Godny, Stephane; Ryan, Paul; Loo, Roger; Bhouri, Nada; Caymax, Matty (2007) -
In-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffraction
Nguyen, Duy; Loo, Roger; Hikavyy, Andriy; Van Daele, Benny; Ryan, Paul; Wormington, Matthew; Hopkins, John (2007) -
Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence
Bogdanowicz, Janusz; Oniki, Yusuke; Kenis, Karine; Puttarame Gowda, Pallavi; Mertens, Hans; Shamieh, Basel; Leon, Yonatan; Wormington, Matthew; Van der Meer, Juliette; Charley, Anne-Laure (2023) -
Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures
Schulze, Andreas; Loo, Roger; Ryan, Paul; Wormington, Matthew; Favia, Paola; Witters, Liesbeth; Collaert, Nadine; Vandervorst, Wilfried; Caymax, Matty (2017) -
Processing technologies for advanced Ge devices
Loo, Roger; Hikavyy, Andriy; Witters, Liesbeth; Schulze, Andreas; Arimura, Hiroaki; Cott, Daire; Porret, Clément; Mertens, Hans; Ryan, Paul; Wall, John; Matney, Kevin; Wormington, Matthew; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron (2016-10) -
Processing technologies for advanced Ge devices
Loo, Roger; Hikavyy, Andriy; Witters, Liesbeth; Schulze, Andreas; Arimura, Hiroaki; Cott, Daire; Mitard, Jerome; Porret, Clément; Mertens, Hans; Ryan, Paul; Wall, John; Matney, Kevin; Wormington, Matthew; Favia, Paola; Richard, Olivier; Bender, Hugo; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron (2016-09) -
Processing technologies for advanced Ge devices
Loo, Roger; Hikavyy, Andriy; Witters, Liesbeth; Schulze, Andreas; Arimura, Hiroaki; Cott, Daire; Mitard, Jerome; Porret, Clément; Mertens, Hans; Ryan, Paul; Wall, John; Matney, Kevin; Wormington, Matthew; Favia, Paola; Richard, Olivier; Thean, Aaron; Horiguchi, Naoto; Collaert, Nadine (2017) -
Strain and composition monitoring in various (Si)Ge fin structures using in-line HRXRD
Schulze, Andreas; Loo, Roger; Witters, Liesbeth; Mertens, Hans; Collaert, Nadine; Horiguchi, Naoto; Wormington, Matthew; Ryan, Paul; Vandervorst, Wilfried; Caymax, Matty (2017) -
Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction
Schulze, Andreas; Loo, Roger; Witters, Liesbeth; Mertens, Hans; Gawlik, Andrzej; Horiguchi, Naoto; Collaert, Nadine; Wormington, Matthew; Ryan, Paul; Vandervorst, Wilfried; Caymax, Matty (2017)