Browsing Articles by imec author "107a1b814895c363316d8b16332bd8161a36b782"
Now showing items 1-11 of 11
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Analog performance and its variability in sub-10 nm fin-width FinFETs: a detailed analysis
Bhoir, Mandar S.; Chiarella, Thomas; Ragnarsson, Lars-Ake; Mitard, Jerome; Terzieva, Valentina; Horiguchi, Naoto; Mohapatra, Nihar R. (2019) -
Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge Layers on Si substrates
Terzieva, Valentina; Souriau, Laurent; Caymax, Matty; Brunco, David; Moussa, Alain; Van Elshocht, Sven; Loo, Roger; Clemente, Francesca; Satta, Alessandra; Meuris, Marc (2008) -
Characterisation of JSR's spin-on hardmask FF-02
Das, Arabinda; Le, Quoc Toan; Furukawa, Yukiko; Nguyen Hoang, Viet; Terzieva, Valentina; de Theije, Femke; Whelan, Caroline; Maenhoudt, Mireille; Struyf, Herbert; Tokei, Zsolt; Iacopi, Francesca; Stucchi, Michele; Carbonell, Laure; Vos, Ingrid; Bender, Hugo; Patz, M.; Beyer, Gerald; Van Hove, Marleen; Maex, Karen (2003) -
Characterization of threading dislocations in thin germanium layers by defect etching: towards chromium and HF free solution
Souriau, Laurent; Atanasova, Tanya; Terzieva, Valentina; Moussa, Alain; Caymax, Matty; Loo, Roger; Meuris, Marc; Vandervorst, Wilfried (2008) -
Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Sutcliffe, Victor; Whelan, Caroline; Maex, Karen (2005) -
Corrosion of narrow copper damascene interconnects
Ernur, Didem; Terzieva, Valentina; Wu, Wen; Brongersma, Sywert; Maex, Karen (2004) -
Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference
De Jaeger, Brice; Kaczer, Ben; Zimmerman, Paul; Opsomer, Karl; Winderickx, Gillis; Van Steenbergen, Jan; Van Moorhem, Els; Terzieva, Valentina; Bonzom, Renaud; Leys, Frederik; Arena, Chantal; Bauer, Matthias; Werkhoven, Chris; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007-01) -
Germanium MOSFET devices: advances in materials understanding, process development, and electrical performance
Brunco, David; De Jaeger, Brice; Eneman, Geert; Mitard, Jerome; Hellings, Geert; Satta, Alessandra; Terzieva, Valentina; Souriau, Laurent; Leys, Frederik; Pourtois, Geoffrey; Houssa, Michel; Winderickx, Gillis; Vrancken, Evi; Sioncke, Sonja; Opsomer, Karl; Nicholas, Gareth; Caymax, Matty; Stesmans, Andre; Van Steenbergen, Jan; Mertens, Paul; Meuris, Marc; Heyns, Marc (2008) -
High Ge content SGOI substrates obtained by the Ge condensation technique: a template for growth of strained epitaxial Ge
Souriau, Laurent; Terzieva, Valentina; Vandervorst, Wilfried; Clemente, Francesca; Brijs, Bert; Moussa, Alain; Meuris, Marc; Loo, Roger; Caymax, Matty (2008) -
High-hole mobility silicon germaium on insulator substrates with high crystalline quality obtained by the germanium condensation technique
Souriau, Laurent; Nguyen, Tuan; Augendre, Emmanuel; Loo, Roger; Terzieva, Valentina; Caymax, Matty; Cristoloveanu, Sorin; Meuris, Marc; Vandervorst, Wilfried (2009) -
Surface and grain boundary scattering studied in beveled polycrystalline thin copper films
Zhang, Wenqi; Brongersma, Sywert; Clarysse, Trudo; Terzieva, Valentina; Rosseel, Erik; Vandervorst, Wilfried; Maex, Karen (2004)