Authors

Murray, C.; Flannery, C.; Streiter, I.; Schulz, S. E.; Baklanov, Mikhaïl; Mogilnikov, K. P.; Himcinschi, C.; Friedrich, M.; Zahn, D. R. T.; Gessner, T.

Conference

MAM - European Workshop on Materials for Advanced Metallization; 5-7 March 2001; Sigtuna, Sweden.

Title

Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films

Publication type

Oral presentation