Browsing by author "Baklanov, Mikhaïl"
Now showing items 1-20 of 506
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1-D model of OSG low-k films modification by EUV/VUV emission
Rakhimova, T.V.; Rakhimov, A.T.; Mankelevich, Y.A.; Lopaev, D.V.; Ziryanov, S.M.; Kovalev, A.S.; Vasil'eva, A.N.; Proshina, O.V.; Braginsky, O.V.; Kurchikov, K.; Baklanov, Mikhaïl (2013) -
1-D model of RF CCP discharge in Ar/CF4/CF3I gas mixtures
Proshina, Olga; Rakhimova, Tatyana; Baklanov, Mikhaïl (2013) -
A discussion of the practical importance of positron annihilation lifetime spectroscopy percolation threshold in evaluation of porous low-k dielectrics
Mogilnikov, K.P.; Baklanov, Mikhaïl; Shamiryan, Denis; Petkov, M.P. (2004-01) -
A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers
Goethals, Frederik; Baklanov, Mikhaïl; Ciofi, Ivan; Detavernier, Christophe; Van Der Voort, Pascal; Van Driessche, Isabel (2012) -
A novel approach to characterization of a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
A novel low temperature etch approach to reduce ULK plasma damage
Zhang, Liping; de Marneffe, Jean-Francois; Leroy, F.; Ljazouli, R.; Lefaucheux, P.; Tillocher, T; Dussart, R.; Maekawa, K.; Yatsuda, K.; Dussarrat, C.; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates
Travaly, Youssef; Schuhmacher, Jorg; Baklanov, Mikhaïl; Giangrandi, Simone; Richard, Olivier; Brijs, Bert; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Somers, K.R.F; Hendrickx, M.F.A; Vanquickenborne, L.G.; Ceulemans, A.; Jonas, A.M (2005-10) -
Active species in porous media: random walk and capture in traps
Arkhincheev, V.E.; Kunnen, Eddy; Baklanov, Mikhaïl (2011) -
Active species in porous media: random walk and capture in traps
Arkhincheev, Valeriy; Kunnen, Eddy; Baklanov, Mikhaïl (2010) -
Adsorption isobars of fluorocarbon compounds for cryogenic plasma etching of low-k dielectrics (in Russian)
Rezvanov, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogil'nikov, K.; Zhang, Liping; de Marneffe, Jean-Francois; Dussarat, C.; Baklanov, Mikhaïl (2015) -
Adsorption isobars of fluorocarbon compounds selected for cryogenic etching of low-k materials
Rezvanov, A.; Mogilnikov, K.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Zhang, Liping; Dussarrat, C.; de Marneffe, Jean-Francois; Baklanov, Mikhaïl (2015) -
Advanced CMOS manufacturing, a drive for plasma science and technology
de Marneffe, Jean-Francois; Altamirano Sanchez, Efrain; Milenin, Alexey; Samara, Vladimir; Boullart, Werner; Baklanov, Mikhaïl (2012) -
Advanced interconnects: materials, processing, and reliability
Baklanov, Mikhaïl; Adelmann, Christoph; Zhao, Larry; De Gendt, Stefan (2015) -
Advanced organic polymers for the aggressive scaling of low-k materials
Pantouvaki, Marianna; Huffman, Craig; Zhao, Larry; Heylen, Nancy; Ono, Y; Nakajima, M; Nakatani, K; Beyer, Gerald; Baklanov, Mikhaïl (2011) -
Advanced organic polymers for the aggressive scaling of low-k materials
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Heylen, Nancy; Ono, Yukiharu; Nakajima, Michio; Nakatani, Koji; Beyer, Gerald; Baklanov, Mikhaïl (2010) -
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young's modulus
Verdonck, Patrick; Wang, Cong; Le, Quoc Toan; Souriau, Laurent; Vanstreels, Kris; Krishtab, Mikhail; Baklanov, Mikhaïl (2014) -
Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young�s modulus
Verdonck, Patrick; Wang, Cong; Souriau, Laurent; Vanstreels, Kris; Baklanov, Mikhaïl (2013) -
Advanced solutions for copper and low k technology
Beyer, Gerald; Baklanov, Mikhaïl; Brongersma, Sywert; De Roest, David; Donaton, R.; Grillaert, Joost; Lanckmans, Filip; Maenhoudt, Mireille; Maex, Karen; Richard, Emmanuel; Struyf, Herbert; Stucchi, Michele; Tokei, Zsolt; Van Hove, Marleen; Vervoort, Iwan (2000) -
Advanced ultralow-k organosilicate glasses: NEXAFS study
Konashuk, A.; Filatova, E.; Afanasiev, Valeri; Krishtab, Mikhail; Redzheb, Murad; Baklanov, Mikhaïl (2015) -
Advances and challenges in ultra low-k patterning
Xu, Kaidong; Souriau, Laurent; Lazzarino, Frederic; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Boullart, Werner (2012)