Browsing by author "Baklanov, Mikhaïl"
Now showing items 21-40 of 506
-
Aggressive scaling of Cu lowk: impact on metrology
Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Vanstreels, Kris; Travaly, Youssef; Baklanov, Mikhaïl; D'Haen, Jan; Beyer, Gerald (2005) -
Alternative integration of ultra low-k dielectrics by template replacement approach
Zhang, Liping; de Marneffe, Jean-Francois; Heylen, Nancy; Murdoch, Gayle; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films
Levrau, Elisabeth; Devloo-Casier, K; Dendooven, Jolien; Verdonck, Patrick; Baklanov, Mikhaïl; Detavernier, Christoph (2013) -
An experimental study of VUV plasma damage on porous organo-silicon glass materials
de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Heyne, Markus; Zhang, Liping; Baklanov, Mikhaïl (2013-02) -
An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices
Hong, Eun Kee; Demuynck, Steven; Le, Quoc Toan; Baklanov, Mikhaïl; Carbonell, Laure; Van Hove, Marleen; Meynen, Herman (2007) -
Analyses of post metal etch cleaning in downstream H2O-based plasma followed by a wet chemistry
Li, H.; Baklanov, Mikhaïl; Boullart, Werner; Conard, Thierry; Brijs, Bert; Maex, Karen; Froyen, L. (1999) -
Anomalous behavior near T-c and synchronization of Andreev reflection in two-dimensional arrays of SNS junctions
Baturina, T.I.; Tsaplin, Y.A.; Plotnikov, A.E.; Baklanov, Mikhaïl (2005) -
Applicability of HF solutions for contact hole cleaning on top of TiSi2
Baklanov, Mikhaïl; Kondoh, Eiichi; Vanhaelemeersch, Serge; Maex, Karen (1998) -
Applicability of HF solutions for the cleaning of TiSi2 surface
Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (1997) -
Application of fully fluorinated cyclic saturated hydrocarbons for highly selective nanoscale silicon dioxide reactive ion etching
Yanovich, S.; Baklanov, Mikhaïl; Orlov, S.; Gushchin, O.; Zaitsev, N.; Ignatov, P.; Yafarov, R. (2012) -
Application of porous low-k dielectrics and copper in microelectronics
Le, Quoc Toan; Baklanov, Mikhaïl; Claeys, Cor; Snow, Jim; Vanhaelemeersch, Serge (2005) -
Applications of cryogenic plasma etching for microtechnology and advanced CMOS manufacturing
Dussart, R.; Lefaucheux, P.; Tillocher, T.; Ranson, P.; Boufnichel, M.; Ljazouli, R.; Zhang, Liping; Mankelevich, Y.; de Marneffe, Jean-Francois; De Gendt, Stefan; Baklanov, Mikhaïl (2013) -
Applications of in-line oxygen monitoring to a rapid thermal processing tool: diagnosing gas flow dynamics and silicidation processes
Kondoh, Eiichi; Baklanov, Mikhaïl; Maex, Karen (2000) -
Atomic layer deposition of TiO2 on surface modified nanoporous low-k films
Levrau, Elisabeth; Devloo-Casier, Kilain; Dendooven, Jolien; Ludwig, Karl; Verdonck, Patrick; Meersschaut, Johan; Baklanov, Mikhaïl; Detavernier, Christophe (2013) -
Auto-emission device with nano-diamond cathode
Gutschin, O.; Zaitsev, N.; Ignatov, P.; Yanovich, S.; Orlov, S.; Kartashiov, D.; Yafarov, R.; Baklanov, Mikhaïl (2010) -
Bandgap narrowing in low-k dielectrics
Guo, X; King, S; Xue, P; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Afanasiev, Valeri; Nishi, Y.; Shohet, J. (2015) -
Bulk properties of MOCVD-deposited HfO2 layers for high-k dielectric applications
Van Elshocht, Sven; Baklanov, Mikhaïl; Brijs, Bert; Carter, R.; Caymax, Matty; Carbonell, Laure; Claes, Martine; Conard, Thierry; Cosnier, Vincent; Date, Lucien; De Gendt, Stefan; Kluth, J.; Pique, Didier; Richard, Olivier; Vanhaeren, Danielle; Vereecke, Guy; Witters, Thomas; Zhao, Chao; Heyns, Marc (2004) -
Calculation of dielectric constant of porous SiCOH low-k films
Palov, A.; Rakhimova, T; Krishtab, Mikhail; Baklanov, Mikhaïl (2015) -
Calculation of pore size distribution in the ellipsometric porosimetry: method and reliability
Mogilnikov, K. P.; Polovinkin, V. G.; Dultsev, F. N.; Baklanov, Mikhaïl (2000) -
Capacitance measurements and K-value extractions of low-K films
Ciofi, Ivan; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald (2010)