Browsing Presentations by imec author "13dcefe5013b4ca8662463b7feca3642af9ed6c9"
Now showing items 1-20 of 52
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3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions
Vandervorst, Wilfried; Schulze, Andreas; Eyben, Pierre; Zschaetzsch, Gerd; Koelling, Sebastian; Kumar, Arul; Mody, Jay; Gilbert, Matthieu (2011) -
Application of FFT-scanning spreading resistance microscopy to the analysis of poly-silicon solar-cells
Eyben, Pierre; Bisiaux, Pierre; Schulze, Andreas; Vandervorst, Wilfried (2014) -
Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Eyben, Pierre; Mody, Jay; Vemula, Sri Charan; Koelling, Sebastian; Verheyden, R.; Vandervorst, Wilfried; Raineri, V.; Giannazzo, F.; Verheijen, M.; Kim, D.H. (2007) -
Characterization of vertical resurf diodes using scanning probe microsopy
Duhayon, Natasja; Xu, Mingwei; Alvarez, David; Eyben, Pierre; Vandervorst, Wilfried; Hellemans, L.; Rochefort, Christelle; Van Dalen, Rob (2002) -
Combining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopy
Eyben, Pierre; Chintala, Ravi Chandra; Mannarino, Manuel; Nazir, Aftab; Schulze, Andreas; Vandervorst, Wilfried (2013) -
Conformal doping for FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas Y.; Eyben, Pierre; Mody, Jay; Koelling, Sebastian; Gilbert, Matthieu; Pawlak, Bartek; Duffy, R.; Van Dal, Mark (2008) -
Counting dopants/atoms in 2D/3D nanoscale structures
Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Kambham, Ajay Kumar; Koelling, Sebastian; Gilbert, Matthieu (2010) -
Damage-free contact mode current sensing SPM: benchmarking PFTUNA vs. C-AFM
Celano, Umberto; Chintala, Ravi Chandra; Hoflijk, Ilse; Moussa, Alain; Vanhaeren, Danielle; Mannarino, Manuel; Nazir, Aftab; Eyben, Pierre; Vandervorst, Wilfried (2013) -
Development and optimization of FIB-based sample preparation for SSRM
Eyben, Pierre; Mody, Jay; Nazir, Aftab; Schulze, Andreas; Hantschel, Thomas; Vandervorst, Wilfried (2010) -
Development of a dedicated software for the quantification of two-dimensional high vacuum scanning spreading resistance microscopy measurements
Eyben, Pierre; Clarysse, Trudo; Schulze, Andreas; Nazir, Aftab; Vandervorst, Wilfried (2012) -
Development of methodologies for characterizing individual carbon nanotubes and silicon nanowires for use in nanoelectronics technology
Hantschel, Thomas; Cott, Daire; Palanne, Saku; Richard, Olivier; Arstila, Kai; Verhulst, Anne; Schulz, Volker; Eyben, Pierre; Vandervorst, Wilfried (2008) -
Diamond tips for electrical probing on the nanometer scale
Hantschel, Thomas; Arstila, Kai; Schulze, Andreas; Eyben, Pierre; Tsigkourakos, Menelaos; Vandervorst, Wilfried (2011) -
Electrical properties of APTMS SAM layers studied with conductive atomic force microscope
Chintala, Ravi Chandra; Eyben, Pierre; Vandervorst, Wilfried; Armini, Silvia; Sun, Yiting (2012) -
Electrical scanning probe techniques in semiconductor research
Trenkler, Thomas; De Wolf, Peter; Eyben, Pierre; Haegeman, Bart; Stephenson, Robert; Hantschel, Thomas; Vandervorst, Wilfried (1999) -
Extending scanning spreading resistance microscopy towards three-dimensional quantitative carrier mapping in nanowire-based transistors
Schulze, Andreas; Hantschel, Thomas; Eyben, Pierre; Verhulst, Anne; Rooyackers, Rita; Vandooren, Anne; Vandervorst, Wilfried (2012) -
Fabrication of conductive AFM probes and their use in microelectronics
Fouchier, Marc; Alvarez, David; Eyben, Pierre; Duhayon, Natasja; Petry, Jasmine; Drijbooms, Chris (2003) -
High resolution dopant/carrier profiling for deep submicron technologies
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Eyben, Pierre; Haegeman, Bart; Xu, Mingwei; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; Conard, Thierry; De Witte, Hilde (1999) -
Incorporation of 2D-carrier profiles from HV-SSRM into device simulator
Nazir, Aftab; Eyben, Pierre; Clarysse, Trudo; Schulze, Andreas; Vandervorst, Wilfried (2011) -
Increasing the performances of the SSRM technique introducing the FFT-SSRM mode
Eyben, Pierre; Bisiaux, Pierre; Vandervorst, Wilfried (2014) -
Integration of SPER and FUSI in a pFET
Severi, Simone; Pawlak, Bartek; Veloso, Anabela; Duffy, Ray; Kottantharayil, Anil; Lauwers, Anne; Henson, Kirklen; de Marneffe, Jean-Francois; Eyben, Pierre; Vandervorst, Wilfried; De Meyer, Kristin; Jurczak, Gosia; Biesemans, Serge (2004)