Browsing Presentations by imec author "2c60d19f643e70d5f26a2b97629c1c07241e9290"
Now showing items 41-60 of 128
-
Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layers
Houssa, Michel; Degraeve, Robin; Pomarede, C.; van Dijk, Kitty; Werkhoven, Chris; Mertens, Paul; Heyns, Marc; Stesmans, Andre (1999) -
Electrical properties of metal-insulator-semiconductor devices with high permittivity gate dielectric layers
Houssa, Michel; Degraeve, Robin; Heyns, Marc; Kaczer, Ben; Groeseneken, Guido; Naili, Mohamed; Mertens, Paul; Stesmans, Andre; Jeon, J. S.; Halliyal, A. (2000) -
Electrochemical study on the mechanism of copper depostion on silicon surfaces in HF solutions
Teerlinck, Ivo; Gomes, W.; Mertens, Paul; Heyns, Marc (1999) -
Evaluation of a dry laser cleaning process for the removal of surface particles
Vereecke, Guy; Röhr, Erika; Heyns, Marc (1998) -
Evolution of optoelectronic properties of graphene under ozone treatment
Klekachev, Alexander; Cantoro, Mirco; Kuznetsov, Sergey; Heyns, Marc; De Gendt, Stefan; Stesmans, Andre (2011) -
EXAFS investigation of Sn local environment in strained and relaxed epitaxial Ge1xSnx films
Gencarelli, Federica; Grandjean, Didier; Shimura, Yosuke; Vincent, Benjamin; Banerjee, Dipanjan; Vantomme, Andre; Vandervorst, Wilfried; Loo, Roger; Heyns, Marc; Temst, Kristiaan (2015) -
Exploring Ge and III-V devices to scale CMOS beyond the Si roadmap
Heyns, Marc (2012) -
Fabrication and characterization of Si and hetero-junction tunnel field effect transistors
Claeys, Cor; Leonelli, Daniele; Rooyackers, Rita; Vandooren, Anne; Verhulst, Anne; Heyns, Marc; Groeseneken, Guido; De Gendt, Stefan (2009) -
First-principles simulations of the oxidation of the GaAs(001)-beta2(2x4) surface
Scarrozza, Marco; Pourtois, Geoffrey; Houssa, Michel; Meuris, Marc; Heyns, Marc (2008) -
Gas-phase surface proessing prior to 3.2nm gate oxidation
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Bearda, Twan; Mertens, Paul; Heyns, Marc (1998) -
Ge and III-V passivation issues
Houssa, Michel; Brammertz, Guy; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007) -
Ge and III/V: the CMOS of the future
Heyns, Marc; Adelmann, Christoph; Bellenger, Florence; Brammertz, Guy; Brunco, David; Caymax, Matty; De Jaeger, Brice; Delabie, Annelies; Eneman, Geert; Houssa, Michel; Kaczer, Ben; Lin, Dennis; Martens, Koen; Meuris, Marc; Mitard, Jerome; Opsomer, Karl; Pourtois, Geoffrey; Satta, Alessandra; Scarrozza, Marco; Simoen, Eddy; Sioncke, Sonja; Souriau, Laurent; Terzieva, Valentina; Van Elshocht, Sven (2007) -
Ge low-temperature chemical vapor deposition (CVD) using Ge2H6
Gencarelli, Federica; Vincent, Benjamin; Souriau, Laurent; Loo, Roger; Caymax, Matty; Heyns, Marc (2011) -
Germanium deep-submicron pFET and nFET devices with etched TaN metal gate and high-k dielectric, fabricated on germanium-on-insulator substrates
Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Letertre, Fabrice; Raskin, Geoffroy; Billon, Thierry; Heyns, Marc (2005) -
Graphene for microelectronics
van der Veen, Marleen; Soree, Bart; Cantoro, Mirco; Klekachev, Alexander; Nourbakhsh, Amirhasan; Clemente, Francesca; Szepieniec, Mark; Vereecken, Philippe; Stesmans, Andre; Sels, Bert; De Gendt, Stefan; Heyns, Marc (2009) -
Growth and characterization of single and mixed metal oxides by ALCVD on various surfaces for high-k gate stack applications
Caymax, Matty; Brijs, Bert; Carter, Richard; Claes, Martine; Conard, Thierry; De Gendt, Stefan; Delabie, Annelies; Heyns, Marc; Richard, Olivier; Vandervorst, Wilfried; Zhao, Chao; Maes, Jan; Chen, Jerry; Cosnier, Vincent; Green, Martin; Kaushik, Vidya; Kluth, Jon; Tsai, Wilman (2002) -
Growth and reliability of 3nm N2O gate oxide
Nigam, Tanya; Depas, Michel; Heyns, Marc (1996) -
H2/D2 isotopic effect on negative bias temperature instabilities in SiOx/HfSiON/TaN gate stacks
Houssa, Michel; Aoulaiche, Marc; Stesmans, Andre; De Gendt, Stefan; Groeseneken, Guido; Heyns, Marc (2005) -
High k dielectric materials prepared by atomic layer CVD
Heyns, Marc; Bender, Hugo; Carter, Richard; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; De Witte, Hilde; Groeseneken, Guido; Haukka, S.; Henson, Kirklen; Houssa, Michel; Kubicek, Stefan; Maes, Guido; Naili, Mohamed; Nohira, Hiroshi; Tsai, Wilman; Tuominen, Marko; Vandervorst, Wilfried; Wilhelm, Rudi; Yang, E.; Zhao, Chao (2001)