Browsing Presentations by imec author "7cfec831c43fbbb23f145df5843259defaf12773"
Now showing items 1-20 of 45
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A novel resist and post-etch residue removal process using ozonated chemistry
De Gendt, Stefan; Snee, Peter; Cornelissen, Ingrid; Lux, Marcel; Vos, Rita; Mertens, Paul; Knotter, Martin; Meuris, Marc; Heyns, Marc (1998) -
A study of the degradation mechanisms of ultra thin CIGS solar cells submitted to a damp heat environment
Kohl, Thierry; de Wild, Jessica; Rivas Rivas, Nicolas; Buldu, Dilara Gokcen; Birant, Gizem; Brammertz, Guy; Renner, Frank; Meuris, Marc; Poortmans, Jef (2019) -
A study of the degradation mechanisms of ultra-thin CIGS solar cells submitted to a damp heat environment
Kohl, Thierry; de Wild, Jessica; Rivas Rivas, Nicolas; Buldu, Dilara Gokcen; Birant, Gizem; Brammertz, Guy; Renner, Frank; Meuris, Marc; Poortmans, Jef; Vermang, Bart (2019) -
Advanced cleaning and ultra-thin oxide technology
Heyns, Marc; Cornelissen, Ingrid; De Gendt, Stefan; Degraeve, Robin; Knotter, D. M.; Mertens, Paul; Mertens, S.; Meuris, Marc; Nigam, Tanya; Rotondaro, Antonio; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1998) -
Atomic layer deposition as an enabling technology for fabrication of germanium MOS transistor
Eneman, Geert; Delabie, Annelies; Van Elshocht, Sven; De Jaeger, Brice; Nicholas, Gareth; Martens, Koen; Brunco, David; Zimmerman, Paul; Houssa, Michel; Pourtois, Geoffrey; Kaczer, Ben; Leys, Frederik; Winderickx, Gillis; Huyghebaert, Cedric; Terzieva, Valentina; Loo, Roger; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007) -
Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge layers on Si substrates
Terzieva, Valentina; Souriau, Laurent; Caymax, Matty; Brunco, David; Moussa, Alain; Van Elshocht, Sven; Loo, Roger; Meuris, Marc (2007) -
Charge pumping characterization of germanium MOSFETs
Martens, Koen; Kaczer, Ben; De Jaeger, Brice; Meuris, Marc; Maes, Herman; Groeseneken, Guido (2007) -
Cleaning, rinsing and drying aspects in post-Cu-CMP clean
Fyen, Wim; Vos, Rita; Teerlinck, Ivo; Vrancken, Evi; Grillaert, Joost; Meuris, Marc; Heyns, Marc (1999) -
Copper CMP using a Lam teres linear planarization technology
Vos, I.; Meuris, Marc; Sijmus, Bram; Stella, Mario; Delaney, N.; Gobbin, Korneel (2001) -
Cu deposition on Si surfaces from HF solutions in VLSI microfabrication
Teerlinck, Ivo; Mertens, Paul; Vos, Rita; Meuris, Marc; Heyns, Marc (1996) -
Cu2ZnSnSe4 solar cells from selenization of sputtered metal layers
Brammertz, Guy; Ren, Ray; Mertens, Sofie; Hendrickx, Jurgen; Marko, Hakim; Esmaeil Zaghi, Armin; Lenaers, Nick; Vleugels, Jef; Meuris, Marc; Poortmans, Jef (2012) -
Defect characterization in Cu2ZnSnSe4-CdS-ZnO solar cells
Brammertz, Guy; Oueslati, Souhaib; Buffiere, Marie; Sahayaraj, Sylvester; Meuris, Marc; Poortmans, Jef (2014) -
Developments in cleaning technology for critical layers
Heyns, Marc; Arnauts, Sophia; Bearda, Twan; Claes, M.; Cornelissen, Ingrid; De Gendt, Stefan; Doumen, Geert; Fyen, Wim; Loewenstein, Lee; Lux, Marcel; Mertens, Paul; Mertens, S.; Meuris, Marc; Onsia, Bart; Röhr, Erika; Schaekers, Marc; Teerlinck, Ivo; Van Doorne, Patrick; Van Hoeymissen, Jan; Vereecke, Guy; Vos, Rita; Wolke, K. (2000) -
Effect of CMP slurry filtration on wafer defectivity
Devriendt, Katia; Meuris, Marc; Heylen, Nancy; Vrancken, Evi; Grillaert, Joost; Heyns, Marc; Ling, Zhi Ming (1998) -
Electrical characteristics of Ge/GeOx(N)/HfO2 gate stacks
Houssa, Michel; De Jaeger, Brice; Delabie, Annelies; Van Elshocht, Sven; Afanasiev, Valeri; Autran, J.L.; Stesmans, Andre; Meuris, Marc; Heyns, Marc (2004) -
Experimental analysis of a Ge-HfO2-TaN gate stack with a large amount of interface states
Croon, Jeroen; Kaczer, Ben; Lujan, Guilherme; Kubicek, Stefan; Groeseneken, Guido; Meuris, Marc (2004) -
First-principles simulations of the oxidation of the GaAs(001)-beta2(2x4) surface
Scarrozza, Marco; Pourtois, Geoffrey; Houssa, Michel; Meuris, Marc; Heyns, Marc (2008) -
Ge and III-V passivation issues
Houssa, Michel; Brammertz, Guy; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007) -
Ge and III/V: the CMOS of the future
Heyns, Marc; Adelmann, Christoph; Bellenger, Florence; Brammertz, Guy; Brunco, David; Caymax, Matty; De Jaeger, Brice; Delabie, Annelies; Eneman, Geert; Houssa, Michel; Kaczer, Ben; Lin, Dennis; Martens, Koen; Meuris, Marc; Mitard, Jerome; Opsomer, Karl; Pourtois, Geoffrey; Satta, Alessandra; Scarrozza, Marco; Simoen, Eddy; Sioncke, Sonja; Souriau, Laurent; Terzieva, Valentina; Van Elshocht, Sven (2007) -
Germanium deep-submicron pFET and nFET devices with etched TaN metal gate and high-k dielectric, fabricated on germanium-on-insulator substrates
Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Letertre, Fabrice; Raskin, Geoffroy; Billon, Thierry; Heyns, Marc (2005)