Browsing Presentations by author "Chan, BT"
Now showing items 1-15 of 15
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28nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy directed self-assembly (DSA) process flow
Chan, BT; Tahara, Shigeru; Parnell, Doni; Rincon Delgadillo, Paulina; Gronheid, Roel; de Marneffe, Jean-Francois; Xu, Kaidong; Nishimura, Eiichi; Werner, Thilo (2013) -
Advanced simulation & design of a spin-photon interface in silicon
Mohiyaddin, Fahd Ayyalil; Dumoulin Stuyck, Nard; Govoreanu, Bogdan; Li, Roy; Potocnik, Anton; Verjauw, Jeroen; Ciubotaru, Florin; Brebels, Steven; Chan, BT; Jussot, Julien; Kubicek, Stefan; Spessot, Alessio; Radu, Iuliana (2019) -
Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen (2012) -
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Doise, Jan; MKuppuswamy, Vijaya Kumar; Chan, BT; Gronheid, Roel; Vandenberghe, Geert; Cao, Yi; Her, YoungJun (2014) -
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Gronheid, Roel; MKuppuswamy, Vijaya Kumar; Doise, Jan; Chan, BT; Vandenberghe, Geert; Sayan, Safak; Cao, Yi; Her, YoungJun (2014) -
Defect characterization in templated DSA through electrical measurements
Rincon Delgadillo, Paulina; Chan, BT; Gronheid, Roel; van der Veen, Marleen; Heylen, Nancy; Vandersmissen, Kevin; Demuynck, Steven; Boemmels, Juergen (2016) -
Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Briggs, Basoene; Hody, Hubert; Spampinato, Valentina; Franquet, Alexis; Chan, BT; Delabie, Annelies (2019) -
Etch challenges on single and dual SOI fins patterning for CFET at 25nm fin pitch
Chan, BT; Boemmels, Juergen; Ryckaert, Julien; Zhang, Liping; Tao, Zheng; Altamirano Sanchez, Efrain; de Marneffe, Jean-Francois (2019) -
Implementation of surface energy modification in grapho-epitaxy directed self-assembly for hole multiplication
Doise, Jan; Gronheid, Roel; Bekaert, Joost; Chan, BT; Cao, Yi; Guanyang, Lin (2015) -
Influence of surface energy modification in grapho-epitaxy DSA
Doise, Jan; Mailfert, Julien; Bekaert, Joost; Chan, BT; Lin, Guanyang; Gronheid, Roel (2015) -
LCDU and placement improvement of contacts using EUV templated DSA
Boeckx, Carolien; Doise, Jan; Chan, BT; Lorusso, Gian; Sutani, Takumichi; Koshihara, Shunsuke; Ishimoto, Toru; Kato, Takeshi; Rincon Delgadillo, Paulina; De Gendt, Stefan (2018) -
N7 Logic via patterning using templated DSA - implementation aspects
Bekaert, Joost; Doise, Jan; Chan, BT; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Her, YoungJun; Cao, Yi (2015) -
Roughness smoothing of BCP patterns with sequential infiltration synthesis
Singh, Arjun; Chan, BT; Gronheid, Roel (2015) -
Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Baryshnikova, Marina; De Simone, Danilo; Chan, BT; Rincon Delgadillo, Paulina; Vandenberghe, Geert; Kachel, Krzysztof; Knaepen, Werner; Maes, Jan; De Roest, David (2017) -
Towards electrical verification of contact holes obtained with DSA of BCP
Rincon Delgadillo, Paulina; Bekaert, Joost; Vandenbroeck, Nadia; Gronheid, Roel; Chan, BT; van der Veen, Marleen; Vandersmissen, Kevin; Boemmels, Juergen; Luong, Vinh (2015)