Browsing by Author "Alay, Josep Lluis"
- Results Per Page
- Sort Options
Publication A fundamental multitechnique of SIMS depth profiling
Proceedings paper1994, Quantitative Surface Analysis Conference - QSA. 8th International Conference, 23/08/1994, p.I10Publication An ESCA study on ion beam induced oxidation of GaAs
Publication An ESCA study on ion beam induced oxidation of Si
Publication Contributions from electron tunneling and local bond breaking to the positive secondary ion yields
Publication Degradation of clean Si-surfaces due to storage in clean (?) wafer boxes
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.367-370Publication Depth profiling with oxygen beams
Proceedings paper1994, Secondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference, 7/11/1993, p.599-608Publication HREM characterization of oxygen ion beam sputtered epitaxial CoSi2
Proceedings paper1994, Proceedings of the 13th International Conference on Electron Microscopy - ICEM, 17/07/1994, p.637-638Publication In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
Journal article1996, Nuclear Instruments and Methods in Physics Research B, 118, p.82-87Publication Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment
Journal article1994, Nuclear Instruments and Methods in Physics Research B, 85, p.911-915Publication Ion-beam induced oxidation of GaAs and AlGaAs
Journal article1995, J. Appl. Phys., (77) 7, p.3010-22Publication Modifications in the Si valence band after ion-beam-induced oxidation
Publication On the altered layer formation in III-V compounds
Publication Optimization of reactive ion etching of Al0.48In0.52As in CH4/H2 by the experimental design method
Publication RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys
Journal article1994, Vacuum, (45) 4, p.389-395Publication Sputtering phenomena of CoSi2 under low energy oxygen bombardment
Journal article1994, Nuclear Instruments and Methods B, (85) 1_4, p.306-310Publication Study of the altered layer formation under oxygen bombardment in combination with flooding
Proceedings paper1994, Secondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference, 7/11/1993, p.617-620Publication UV/ozone pre-treatment on organic contaminated wafer for complete oxide removal in HF vapour cleaning
Proceedings paper1994, Proceedings 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.163-166