Browsing by Author "Balboni, R."

Analysis of depth-inhomogeneous strains in deep sub-micron silicon devices by TEM/CBED

Analytical electron microscopy of Si1-xGex/Si heterostructures and local isolation structures

Analytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation Structures

Electron microscopy techniques for the assessment of localised stress distributions in semiconductors

On the spatial resolution in analytical electron microscopy

On the TEM assessment of local strain distributions in integrated circuit structures

Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy

Strain measurements in thin film structures by convergent beam electron diffraction

Strain measurements in thin film structures by convergent beam electron diffraction

Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling

Transmission electron diffraction techniques for nm scale strain measurement in semiconductors

Transmission electron diffraction techniques for nm scale strain measurements in semiconductors