Browsing by Author "Bearda, Twan"
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Publication 1-μm-thin crystalline silicon solar cells with pseudo-ordered nanotextures
Oral presentation2016, 32nd European PV Solar Energy Conference and Exhibition - EPVSECPublication 11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications
Journal article2010, Journal of Microelectromechanical Systems, (19) 1, p.202-214Publication 18% efficiency IBC cell with rear-surface processed on quartz
Journal article2013, IEEE Journal of Photovoltaics, (3) 2, p.684-689Publication 2D periodic photonic nanostructures integrated in 40 $lm thin crystalline silicon solar cells
Proceedings paper2014, 29th European Photovoltaic Solar Energy Conference and Exhibition - EUPVSEC, 22/09/2014, p.1952-1954Publication A detailed study of semiconductor wafer drying
Oral presentation2004, Particles on Surfaces 8Publication A spectroscopic ellipsometry study of ultra thin amorphous silicon layers deposited on crystalline silicon by PECVD
Oral presentation2012, E-MRS SymposiumPublication Acoustic cleaning in nano-electronics
Proceedings paper2008, Acoustics, 29/06/2008, p.556-560Publication Advanced cleaning for the growth of ultrathin gate oxide
Journal article1999, Microelectronic Engineering, (48) 1_4, p.199-206Publication Advanced cleaning strategies for ultra-clean silicon surfaces
; ;Bearda, Twan; ; ;Loewenstein, LeeProceedings paper1999, Proceedings of the 9th International Conference on Production Engineering - ICPE, 29/08/1999, p.459Publication Advanced wafer surface cleaning technology
Oral presentation2004, SEMICON Korea 2004 STS, S5: Contamination-free Manufacturing SeminarPublication Advances in understanding wet cleaning technology and the effect of metal contamination
; ;Bearda, Twan; ; ;Loewenstein, LeeMeeting abstract1999, Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 17/10/1999, p.1061Publication ALD Al2O3 for industrial Si solar cells: advanced cleaning and in-depth characterization
Meeting abstract2010, 35th IEEE Photovoltaic Specialists Conference, 20/06/2010Publication All-dielectric antenna wavelength router with bidirectional scattering of visible light
Journal article2016, Nano Letters, (16) 7, p.4396-4403Publication All-dielectric nano-antennas for wavelength-controlled bidirectional scattering of visible light
Proceedings paper2016, Nanophotonics VI, 3/04/2016, p.98840WPublication Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites
;Oechsner, Richard ;Pfeffer, M. ;Frickinger, J. ;Schellenberger, M. ;Roeder, G.Pfitzner, L.Journal article2007, IEEE Trans. Semiconductor Manufacturing, (20) 3, p.215-221Publication Atomic and electrical characterisation of amorphous silicon passivation layers
Proceedings paper2012, Proceedings of the 2nd International Conference on Crystalline Silicon Photovoltaics - Silicon PV, 3/04/2012, p.185-190Publication Behaviour of metallic contaminants during MOS processing
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.11-14Publication Behaviour of metallic contaminants during MOS processing
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Breakdown and recovery of thin gate oxides
Proceedings paper2000, Proceedings of the 30th European Solid-State Device Research Conference - ESSDERC, 11/09/2000, p.116-119Publication Breakdown and recovery of thin gate oxides
Journal article2000, Japanese Journal of Applied Physics. Part 2: Letters, (39) 6B, p.L582-L584