Browsing by Author "Camerotto, Elisabeth"
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Publication Air-gap formation by UV-assisted decomposition of CVD material
Meeting abstract2008, 17th Workshop Materials for Advanced Metallization, 2/03/2008Publication Air-gap formation by UV-assisted decomposition of CVD material
Journal article2008, Microelectronic Engineering, (85) 10, p.2071-2074Publication Enhancement of acoustic heating during nucleation of acoustic cavitation inside an ultrasonic reactor cavity
; ; ; ; Proceedings paper2010, 20th International Congress on Acoustics - ICA, 23/08/2010, p.1-8Publication Generation of plama in liquid using RF and ultrasounds
Meeting abstract2011, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM, 5/05/2011Publication III-V fin patterning in SADP scheme
Meeting abstract2016, Plasma Etch and Strip in Microtechnology - PESM, 9/05/2016Publication Impact of acoustical reflections on megasonic cleaning performance
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.287-294Publication Impact of acoustical reflections on megasonic cleaning performance
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2089Publication Influence of dissolved CO2 on bubble activity in pulsed acoustic fields
Proceedings paper2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.177-180Publication Influence of gas type on ultrasound cleaning efficiency
Meeting abstract2010, 20th International Congress on Acoustics - ICA, 23/08/2010, p.83Publication Influence of gasification on electro-acoustical and cleaning performance of a 1 MHz nozzle system in megasonic cleaning
Meeting abstract2009, 35th International Conference on Micro & Nano Engineering - MNE, 28/09/2009Publication Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning
Journal article2010, Microelectronic Engineering, (87) 5_8, p.1512-1515Publication Influence of surface tension on cavitation noise spectra and particle removal efficiency in high frequency ultrasound fields
Journal article2012, Journal of Applied Physics, (112) 11, p.114322Publication Key factors to sustain the extension of a MHM-based integration scheme to medium and high porosity PECVD low-k materials
Proceedings paper2008, 11th IEEE International Interconnect Technology Conference - IITC, 1/06/2008, p.52-54Publication N10 SADP bulk FinFET depth micro loading improvement with bias pulsing plasma
Meeting abstract2014, Plasma Etch and Strip in Microtechnology - PESM, 12/05/2014, p.P14Publication Nanoparticle removal with megasonics: A review
Journal article2014, ECS Journal of Solid State Science and Technology, (3) 1, p.N3010-N3014Publication Optimizing high frequency ultrasound cleaning in the semiconductor industry
Proceedings paper2012, 8th International Symposium on Cavitation - CAV, 14/08/2012, p.236Publication Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below
Journal article2022-04-26, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, (40) 3, p.032802Publication Physical forces exerted by microbubbles on a surface in a traveling wave field
Journal article2014, Ultrasonics, (54) 2, p.706-709Publication Record performance top-down In0.53Ga0.47As vertical nanowire FETs and vertical nanosheets
Proceedings paper2017, IEEE International Electron Devices Meeting - IEDM, 2/12/2017, p.409-412