Browsing by Author "De Coster, Walter"
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Publication A fundamental multitechnique of SIMS depth profiling
Proceedings paper1994, Quantitative Surface Analysis Conference - QSA. 8th International Conference, 23/08/1994, p.I10Publication Altered layer formation in SiGe
Proceedings paper1997, Secondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference, 2/10/1995, p.529-532Publication An ESCA study on ion beam induced oxidation of Si
;Osiceanu, Petre ;Alay, Josep LluisDe Coster, WalterProceedings paper1995, 18th International Semiconductor Conference. CAS'95 Proceedings, 10/10/1995, p.159-62Publication ARIBA, an all round ion beam acquisition program
Proceedings paper1997, Application of Accelerators in Research and Industry, 6/11/1996, p.673-676Publication ARIBA, An All Round Ion Beam Acquisition Program
Oral presentation1994, 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, UPublication Depth profiling with oxygen beams
Proceedings paper1994, Secondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference, 7/11/1993, p.599-608Publication HREM characterization of oxygen ion beam sputtered epitaxial CoSi2
Proceedings paper1994, Proceedings of the 13th International Conference on Electron Microscopy - ICEM, 17/07/1994, p.637-638Publication In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
Journal article1996, Nuclear Instruments and Methods in Physics Research B, 118, p.82-87Publication In Situ Observation by RBS of Preferential Sputtering During Low Energy Ion Bombardment
Oral presentation1994, 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, UPublication In situ observation of compound formation and ion beam mixing
Proceedings paper1994, Secondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference, 7/11/1993, p.746-749Publication Ion Beam Induced Modification of Si-Based Material during Sputter Profiling
De Coster, WalterPHD thesis1995-01Publication Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment
Journal article1994, Nuclear Instruments and Methods in Physics Research B, 85, p.911-915Publication RBS Analysis of Artefacts Induced by Low Energy Ion Sputtering
Oral presentation1994, 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, UPublication RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys
Journal article1994, Vacuum, (45) 4, p.389-395Publication Sputtering Phenomena of CoSi2 and TiSi2 under Low Energy Oxygen Bombardment
Oral presentation1994, 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, UPublication Sputtering phenomena of CoSi2 under low energy oxygen bombardment
Journal article1994, Nuclear Instruments and Methods B, (85) 1_4, p.306-310Publication Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in
Journal article1996, Nuclear Instruments and Methods in Physics Research B, 118, p.541-546Publication Stoichiometry changes during low energy oxygen bombardment
Journal article1995, Nuclear Instruments and Methods in Physics Research B, (99) 1_4, p.614-18Publication The behaviour of Si and CoSi2 during low energy nitrogen bombardment, with and without O-2 flooding
Journal article1996, Nuclear Instruments and Methods in Physics Research B, 113, p.534-538