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Browsing by Author "De Coster, Walter"

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    A fundamental multitechnique of SIMS depth profiling

    Vandervorst, Wilfried  
    ;
    Brijs, Bert
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    Bender, Hugo  
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    Alay, Josep Lluis
    ;
    De Coster, Walter
    Proceedings paper
    1994, Quantitative Surface Analysis Conference - QSA. 8th International Conference, 23/08/1994, p.I10
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    Altered layer formation in SiGe

    De Coster, Walter
    ;
    Brijs, Bert
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    1997, Secondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference, 2/10/1995, p.529-532
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    An ESCA study on ion beam induced oxidation of Si

    Osiceanu, Petre
    ;
    Alay, Josep Lluis
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    De Coster, Walter
    Proceedings paper
    1995, 18th International Semiconductor Conference. CAS'95 Proceedings, 10/10/1995, p.159-62
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    ARIBA, an all round ion beam acquisition program

    Brijs, Bert
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    Deleu, Jeroen
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    De Coster, Walter
    ;
    Wills, D.
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    1997, Application of Accelerators in Research and Industry, 6/11/1996, p.673-676
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    ARIBA, An All Round Ion Beam Acquisition Program

    Brijs, Bert
    ;
    De Coster, Walter
    ;
    Deleu, Jeroen
    ;
    Vandervorst, Wilfried  
    ;
    Wils, D.
    ;
    Vandesteene, N.
    Oral presentation
    1994, 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U
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    Depth profiling with oxygen beams

    Vandervorst, Wilfried  
    ;
    Alay, Josep Lluis
    ;
    Brijs, Bert
    ;
    De Coster, Walter
    ;
    Elst, Kathy
    Proceedings paper
    1994, Secondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference, 7/11/1993, p.599-608
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    HREM characterization of oxygen ion beam sputtered epitaxial CoSi2

    Bender, Hugo  
    ;
    De Coster, Walter
    ;
    Brijs, Bert
    ;
    Alay, Josep Lluis
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    1994, Proceedings of the 13th International Conference on Electron Microscopy - ICEM, 17/07/1994, p.637-638
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    In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials

    De Coster, Walter
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    Brijs, Bert
    ;
    Deleu, Jeroen
    ;
    Alay, Josep Lluis
    ;
    Vandervorst, Wilfried  
    Journal article
    1996, Nuclear Instruments and Methods in Physics Research B, 118, p.82-87
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    In Situ Observation by RBS of Preferential Sputtering During Low Energy Ion Bombardment

    De Coster, Walter
    ;
    Brijs, Bert
    ;
    Vandervorst, Wilfried  
    Oral presentation
    1994, 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U
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    In situ observation of compound formation and ion beam mixing

    De Coster, Walter
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    Brijs, Bert
    ;
    Elst, Kathy
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    1994, Secondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference, 7/11/1993, p.746-749
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    Ion Beam Induced Modification of Si-Based Material during Sputter Profiling

    De Coster, Walter
    PHD thesis
    1995-01
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    Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment

    De Coster, Walter
    ;
    Brijs, Bert
    ;
    Osiceanu, Petre
    ;
    Alay, Josep Lluis
    ;
    Caymax, Matty  
    Journal article
    1994, Nuclear Instruments and Methods in Physics Research B, 85, p.911-915
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    RBS Analysis of Artefacts Induced by Low Energy Ion Sputtering

    Brijs, Bert
    ;
    De Coster, Walter
    ;
    Bender, Hugo  
    ;
    Storm, Wolfgang
    ;
    Osiceanu, Petre
    Oral presentation
    1994, 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U
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    RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

    De Coster, Walter
    ;
    Brijs, Bert
    ;
    Bender, Hugo  
    ;
    Alay, Josep Lluis
    ;
    Vandervorst, Wilfried  
    Journal article
    1994, Vacuum, (45) 4, p.389-395
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    Sputtering Phenomena of CoSi2 and TiSi2 under Low Energy Oxygen Bombardment

    Brijs, Bert
    ;
    De Coster, Walter
    ;
    Vandervorst, Wilfried  
    Oral presentation
    1994, 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U
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    Sputtering phenomena of CoSi2 under low energy oxygen bombardment

    Brijs, Bert
    ;
    De Coster, Walter
    ;
    Bender, Hugo  
    ;
    Alay, Josep Lluis
    ;
    Osiceanu, Petre
    Journal article
    1994, Nuclear Instruments and Methods B, (85) 1_4, p.306-310
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    Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in

    Brijs, Bert
    ;
    Deleu, Jeroen
    ;
    Storm, Wolfgang
    ;
    De Coster, Walter
    ;
    Vandervorst, Wilfried  
    Journal article
    1996, Nuclear Instruments and Methods in Physics Research B, 118, p.541-546
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    Stoichiometry changes during low energy oxygen bombardment

    Brijs, Bert
    ;
    De Coster, Walter
    ;
    Bender, Hugo  
    ;
    Storm, Wolfgang
    ;
    Osiceanu, Petre
    Journal article
    1995, Nuclear Instruments and Methods in Physics Research B, (99) 1_4, p.614-18
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    The behaviour of Si and CoSi2 during low energy nitrogen bombardment, with and without O-2 flooding

    Deleu, Jeroen
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    Brijs, Bert
    ;
    Storm, Wolfgang
    ;
    Vandervorst, Wilfried  
    ;
    De Coster, Walter
    Journal article
    1996, Nuclear Instruments and Methods in Physics Research B, 113, p.534-538

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