Browsing by Author "Delie, Gilles"
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Publication Airgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned Vias
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Impact of CVD chemistry on band alignment at the MoS2/SiO2 interface
Journal article2023, SOLID-STATE ELECTRONICS, 209, p.Art. 108782Publication Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Variability of band alignment between WS2 and SiO2: Intrinsic versus extrinsic contributions