Browsing by Author "Delie, Gilles"
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Publication Airgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned Vias
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Energy band alignment in MoS₂/HfO₂: Transfer-related artifacts and interfacial effects
Journal article2025, JOURNAL OF APPLIED PHYSICS, (137) 24, p.244304-1-244304-9Publication Impact of CVD chemistry on band alignment at the MoS2/SiO2 interface
Journal article2023, SOLID-STATE ELECTRONICS, 209, p.Art. 108782Publication Leakage and TDDB Mechanisms in 18 nm Pitch Direct Metal Etch Ru Interconnects with Airgaps
; ; ; ; ; Proceedings paper2025-01-01, 2025 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS, 2025-03-30Publication Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Selecting alternative metals for advanced interconnects
Journal article2024-11-07, Journal of Applied Physics, (136) 17, p.171101Publication Self-aligned 8nm T2T as cell boundary in the middle-of-line
Proceedings paper2024, 2024 International Interconnect Technology Conference, 2024-06-03Publication Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Variability of band alignment between WS2 and SiO2: Intrinsic versus extrinsic contributions