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Browsing by Author "Deng, Shaoren"

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    Atomic layer deposition-based synthesis of photoactive TiO2 nanoparticle chains by using carbon nanotubes as sacrificial templates

    Deng, Shaoren  
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    Verbruggen, Sammy
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    He, Zhanbing
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    Cott, Daire  
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    Vereecken, Philippe  
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    Martens, Johan
    Journal article
    2014, RSC Advances, (4) 23, p.11648-11653
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    Comparison of amorphous TiO2 with anatase thin-films grown By ALD in terms of rate performance and capacity for Li+-insertion

    Moitzheim, Sebastien
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    Deng, Shaoren  
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    Detavernier, Christophe
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    De Gendt, Stefan  
    Meeting abstract
    2015, ECS Conference on Electrochemical Energy Conversion & Storage with SOFC-XIV, 26/07/2015, p.455
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    Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning

    Pasquali, Mattia  
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    De Gendt, Stefan  
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    Armini, Silvia  
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    Illiberi, Andrea  
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    Verni, Giuseppe
    Meeting abstract
    2018, ASD 2019, 4/04/2019, p.24-24
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    Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices

    Deng, Shaoren  
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    Xie, Qi  
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    Deduytsche, Davy
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    Schaekers, Marc  
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    Lin, Dennis  
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    Caymax, Matty  
    Journal article
    2011, Applied Physics Letters, (90) 5, p.52906
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    Electrochemical characterization of lithiation and de-lithiation of ultra-thin amorphous TiO2 films

    Moitzheim, Sebastien
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    Deng, Shaoren  
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    Huyghebaert, Cedric  
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    Detavernier, Christophe
    Oral presentation
    2014, 226th ECS Conference: ECS and SMEQ Joint International Meeting
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    Germanium surface passivation and atomic layer deposition of high- k dielectrics - a tutorial review on Ge-based MOS capacitors

    Xie, Qi  
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    Deng, Shaoren  
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    Schaekers, Marc  
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    Lin, Dennis  
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    Caymax, Matty  
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    Delabie, Annelies  
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    Qu, Xin-Ping
    Journal article
    2012, Semiconductor Science and Technology, (27) 7, p.74012
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    Heterogeneous TiO2/V2O5/carbon nanotube electrodes for lithium-ion batteries

    Kurttepeli, Mert
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    Deng, Shaoren  
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    Mattelaer, Felix
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    Cott, Daire  
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    Vereecken, Philippe  
    Journal article
    2017, ACS Applied Materials & Interfaces, (9) 9, p.8055-8064
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    High-performance Ge MOS capacitors by O2 plasma passivation and O2 ambient annealing

    Xie, Qi  
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    Deng, Shaoren  
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    Schaekers, Marc  
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    Lin, Dennis  
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    Caymax, Matty  
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    Delabie, Annelies  
    Journal article
    2011, IEEE Electron Device Letters, (32) 12, p.1656-1658
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    Localized power spectral density analysis on atomic force microscopy images for advanced patterning applications

    Moussa, Alain  
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    Saib, Mohamed  
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    Paolillo, Sara  
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    Lazzarino, Frederic  
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    Illiberi, Andrea  
    ;
    Maes, Jan  
    Proceedings paper
    2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109591O
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    Nanostructured TiO2/carbon nanosheet hybrid electrode for high-rate thin-film lithium-ion batteries

    Moitzheim, Sebastien
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    Nimisha, Cheenkallel Sreenivasan
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    Deng, Shaoren  
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    Cott, Daire  
    Journal article
    2014, Nanotechnology, (25) 50, p.504008
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    Photocatalytic acetaldehyde oxidation in air using spacious TiO2 films prepared by atomic layer deposition on supported carbonaceous sacrificial templates

    Verbruggen, Sammy
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    Deng, Shaoren  
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    Kurttepeli, Mert
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    Cott, Daire  
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    Vereecken, Philippe  
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    Bals, Sara
    Journal article
    2014, Applied Catalysis B: Environmental, 160-161, p.204-210
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    Porous nanostructured metal oxides synthesized through atomic layer deposition on a carbonaceous template followed by calcination

    Deng, Shaoren  
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    Kurttepeli, Mert
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    Cott, Daire  
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    Bals, Sara
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    Detavernier, Christophe
    Journal article
    2015, Journal of Materials Chemistry A, (3) 6, p.2642-2649
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    Pulsed chemical vapor deposition of conformal GeSe for application as an OTS selector

    Haider, Ali  
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    Deng, Shaoren
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    Devulder, Wouter  
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    Maes, Jan Willem
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    Girard, Jean-Marc
    Journal article
    2021, MATERIALS ADVANCES, (2) 5, p.1635-1643
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    Pulsed CVD of amorphous GeSe for application as OTS selector

    Haider, Ali  
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    Deng, Shaoren  
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    Schapmans, Elie
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    Maes, Jan  
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    Girard, Jean-Marc
    Meeting abstract
    2019, AVS ALD 2019, 22/07/2019
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    Pulsed CVD/ALD of amorphous GeSe for application as OTS selector

    Haider, Ali  
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    Caymax, Matty  
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    Deng, Shaoren  
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    Schapmans, Elie
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    Maes, Jan  
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    Girard, Jean-Marc
    Meeting abstract
    2019, EuroCVD 22 - Baltic ALD 16 Conference, 24/06/2019
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    Scatterometry and AFM measurement combination for area selective deposition process characterization

    Saib, Mohamed  
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    Moussa, Alain  
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    Charley, Anne-Laure  
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    Leray, Philippe  
    ;
    Hung, Joey  
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    Koret, Roy
    Proceedings paper
    2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109591N
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    Synthesis and characterization of photoreactive TiO2/carbon nanosheet composites

    Kurttepeli, Mert
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    Deng, Shaoren  
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    Verbruggen, Sammy
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    Guzzinati, Giulio
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    Cott, Daire  
    Journal article
    2014, Journal of Physical Chemistry C, (118) 36, p.21031-21037
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    Ultralow gate leakage current density of Ge metal-oxide-semiconductor capacitor passivated by in situ N2 plasma pretreatment

    Deng, Shaoren  
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    Xie, Qi  
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    Schaekers, Marc  
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    Lin, Dennis  
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    Caymax, Matty  
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    Delabie, Annelies  
    Meeting abstract
    2012, Materials for Advanced Metallization - MAM, 11/03/2012, p.O5-01

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