Browsing by Author "Dortu, Fabian"
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Publication Accurate electrical activation characterization of CMOS ultra-shallow profiles
Journal article2004, Materials Science and Engineering B, 114-115, p.166-173Publication Advances in optical carrier profiling through high-frequency modulated optical reflectance
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.310-316Publication Advances in optical carrier profiling through high-frequency modulated optical reflectance
Proceedings paper2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling, 6/05/2007, p.71-81Publication Application of x-ray fluorescence spectrometry in charaterization of high-k uktra-thin films
; ; ; Besling, W.Proceedings paper2003, Analytical Techniques for Semiconductor Materials and Processes, 27/04/2003, p.243-250Publication Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
Journal article2010, Journal of Applied Physics, (108) 10, p.104908Publication Extracting active dopant profile information from carrier illmination power curves
Proceedings paper2005, USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors, 5/06/2005Publication Impact of band gap narrowing and surface recombination on photoelectrothermal modulated optical reflectance power curves
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.322-332Publication Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Journal article2008, Materials Science & Engineering B, 154-155, p.234-239Publication Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Meeting abstract2008, E-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, 26/05/2008Publication Junction depth and active dose extraction from photoelectrothermal modulated optical reflectance (PMOR) power curves
Proceedings paper2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling, 6/05/2007, p.95-104Publication Low frequency modulated optical reflectance for the one-dimensional characterization of ultra-shallow junctions
Dortu, FabianPHD thesis2009-05Publication Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Proceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009Publication Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C1-C1C7Publication Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction
Journal article2007, Journal of Applied Physics, (101) 5, p.53107Publication Progress in the physical modeling of carrier illumination
Proceedings paper2005, USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors, 5/06/2005Publication Synthesis of highly integrated optical network based on microdisk-resonator add-drop filters in silicon-on-insulator technology
Journal article2009-10, Optical Engineering, (48) 10, p.104601-1-104601-7Publication Theory of photomodulated optical reflectance on active doping profiles in silicon
Meeting abstract2009, 15th International Conference on Photoacoustics and Photothermal Phenomena - ICPPP15, 19/07/2009