Browsing by Author "Ekinci, Yasin"
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Publication Characterization of extreme ultraviolet resists with interference lithography
Oral presentation2005, 31st International Conference on Micro-and Nano- EngineeringPublication EUV resist contrast loss determination using interference lithography
Publication Evaluation of resist performance for 22nm half-pitch and beyond using EUV interference lithography
Proceedings paper2010, International Symposium on Extreme Ultraviolet Lithography, 18/10/2010Publication Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
Journal article2019, Journal of Micro/Nanolithography MEMS and MOEMS, (18) 1, p.14002Publication Measuring resist-induced contrast loss using EUV interference lithography
Proceedings paper2010, Extreme Ultraviolet (EUV) Lithography, 21/02/2010, p.76362XPublication Microstepper vs. interference EUV lithography: effects on resist profiles
Proceedings paper2005, 4th International Symposium on EUV Lithography, 7/11/2005Publication Photosensitized Chemically Amplified Resist (PSCAR) 2.0 for high-throughput and high-resolution EUV lithography: dual photosensitization of acid generation and quencher decomposition by flood exposure