Browsing by Author "Eslava Fernandez, Salvador"
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Publication Characterization of molecular sieve coating using ellipsometric porosimetry
Publication Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions
Publication Effects of silica sources on nanoporous organosilicate films with tetraalkylammonium cations
Publication Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions
Publication Nanoporous organosilicate films prepared in acidic conditions using tetraalkylammonium bromide porogens
Publication Optical absorption and characteristics of low-k films and barrier layers in the UV range
Meeting abstract2007, MRS Spring Meeting Symposium B: Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nano, 9/04/2007Publication Optical characteristics of low-k films and barrier layers in the ultra-violet range
Proceedings paper2007, 4th International Conference on Spectroscopic Ellipsometry - ICSE, 11/06/2007Publication Optical property changes in low-k films upon ultraviolet-assisted curing
Publication Overview of porous dielectric materials for semiconductor applications
Publication Profile control of novel non-Si gates using BCl3/N2 plasma
Journal article2007, Journal of Vacuum Science and Technology B, (25) 3, p.739-744Publication Reaction of trimethylchlorosilane in spin-on silicalite-1 zeolite film
Publication Shrinking composite core-shell nanoparticles for CMP
Proceedings paper2005, 79th ACS Colloid and Surface Science Symposium, 12/06/2005Publication Synthesis and characterisation of zeolitic films for low-k dielectric application
Eslava Fernandez, SalvadorPHD thesis2009-01Publication Transmission measurements in rapid growth KDP and DKDP crystals
Publication Ultra-violet-assisted cure of spin-on silicalite-1 films
Publication Ultraviolet-assisted cure of spin-on silicalite-1 films
Publication Ultraviolet-assisted curing of organosilicate glass low-k dielectric by excimer lamps
Publication Ultraviolet-assisted curing of polycrystalline pure-silica zeolites: hydrophobization, functionalization, and cross-linking of grains
Publication Zeolite-inspired low-k dielectrics: overcoming limitations of zeolite films
Publication Zeolite-like films for low-k applications