Browsing by Author "Her, YoungJun"
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Publication Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Oral presentation2014, FujiFilm Electronic Materials WrokshopPublication Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Proceedings paper2014, 30th European Mask and Lithography Conference - EMLC, 24/06/2014, p.92310RPublication Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Oral presentation2014, Photomask Technology (BACUS 2014)Publication Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Meeting abstract2014, Micro and Nano Engineering Conference - MNE, 22/09/2014Publication Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Proceedings paper2014, Alternative Lithographic Technologies VI, 24/02/2014, p.904905Publication N7 Logic via patterning using templated DSA - implementation aspects
Oral presentation2015, European Mask and Lithography Conference - EMLCPublication N7 logic via patterning using templated DSA: implementation aspects
Proceedings paper2015, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII, 20/04/2015, p.965804Publication Readying directed self-assembly for patterning in semiconductor manufacturing
Meeting abstract2014, 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN, 27/05/2014Publication Roughness study on L/S patterning with chemo
Proceedings paper2019, The 5th DSA symposium, 16/10/2019Publication Roughness study on line and space patterning with chemo-epitaxy directed self-assembly
Proceedings paper2020, Advances in Patterning Materials and Processes XXXVII, 23/02/2020, p.113260XPublication The role of guide stripe chemistry in block copolymer directed self assembly
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2014, p.94250W