Browsing by Author "Iacopi, Francesca"
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Publication A 35nm diameter vertical silicon nanowire short-gate tunnelFET
Proceedings paper2009, Nanotechnology Workshop, 13/06/2009Publication A new ultra-low K ILD material based on organic-inorganic hybrid resins
;Zhong, Ben ;Meynen, Herman ;Iacopi, Francesca ;Weidner, Ken ;Malhouitre, StéphaneMoyer, EricProceedings paper2002, Silicon Materials - Processing, Characterization, and Reliability, 1/04/2002, p.B12.4Publication A study of plasma-enhanced CVD growth of Si nanowires catalyzed by indium
Oral presentation2007, European Congress and Exhibition on Advanced Materials and Processes - EUROMATPublication Aggressive scaling of Cu lowk: impact on metrology
Proceedings paper2005, Characterization and Metrology for ULSI Technology, 14/03/2005, p.475-481Publication Alternative catalysts for Si-technology compatible growth of Si nanowires
Proceedings paper2007, Applications of Nanotubes and Nanowires, 9/04/2007, p.EE01-10Publication Alternative catalysts for si-technology compatible growth of si nanowires
Proceedings paper2007, Low-Dimensional Materials. Synthesis, Assembly, Property Scaling, and Modeling, 9/04/2007, p.DD01-10Publication An ionic polymer route to a stable unpinning of the Fermi level of highly doped graphene
Journal article2025, JOURNAL OF APPLIED PHYSICS, (137) 22, p.224303Publication An optimized process for the production of advanced planar wire grid plates as detectors for high energy physics experiments
Journal article2001, Sensors and Actuators A, 93, p.76-83Publication Barrier deposition on porous low-k films
Proceedings paper2003, Proceedings of the Advanced Metallization Conference 2002, 1/10/2002, p.829-833Publication Barrier process development for damascene integration of porous SiLK resin films
Proceedings paper2002, Advanced Metallization Conference 2001, 9/10/2001, p.307-311Publication Barrier studies on porous silk semiconductor dielectric
Journal article2003, Microelectronic Engineering, (70) 2_4, p.352-357Publication Barriers for Cu/low k damascene structures
Journal article2001, Semiconductor Fabtech, 14, p.189-191Publication Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Proceedings paper2003, Polymer/Metal Interfaces and Defect Mediated Phenomena in Ordered Polymers, 2/12/2002, p.383-388Publication Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Oral presentation2002, MRS Fall Meeting Symposium B: Polymer/Metal Interfaces - Fundamentals, Properties, and ApplicationsPublication Calculation of the Au-Ge phase diagram for nanoparticles
Journal article2008, Archives of Metallurgy and Materials, (53) 4, p.1133-1139Publication Calculation of thermodynamic equilibrium conditions between a liquid nanoparticle and a solid nanowires
Proceedings paper2009, European Congress and Exhibition on Advanced Materials and Processes - Euromat, 7/09/2009Publication Challenges for structural stability of ultra-low-k based interconnects
Journal article2004, Microelectronic Engineering, (75) 1, p.54-62Publication Challenges in the implentation of low-k dielectrics in the back-end of line
Journal article2005, Microelectronic Engineering, 80, p.337-344Publication Challenges of clean/strip processing for Cu/LowK technology
;Baklanov, Mikhaïl; ; ;Iacopi, Francesca; Proceedings paper2004, Proceedings of the IEEE International Interconnect Technology Conference - IITC, 7/06/2004, p.187-189Publication Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109
Journal article2002, Microelectronic Engineering, (64) 1_4, p.25-33