Browsing by Author "Iacopi, Francesca"
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Publication A 35nm diameter vertical silicon nanowire short-gate tunnelFET
Proceedings paper2009, Nanotechnology Workshop, 13/06/2009Publication A new ultra-low K ILD material based on organic-inorganic hybrid resins
Publication A study of plasma-enhanced CVD growth of Si nanowires catalyzed by indium
Oral presentation2007, European Congress and Exhibition on Advanced Materials and Processes - EUROMATPublication Aggressive scaling of Cu lowk: impact on metrology
Proceedings paper2005, Characterization and Metrology for ULSI Technology, 14/03/2005, p.475-481Publication Alternative catalysts for si-technology compatible growth of si nanowires
Proceedings paper2007, Low-Dimensional Materials. Synthesis, Assembly, Property Scaling, and Modeling, 9/04/2007, p.DD01-10Publication Alternative catalysts for Si-technology compatible growth of Si nanowires
Proceedings paper2007, Applications of Nanotubes and Nanowires, 9/04/2007, p.EE01-10Publication An optimized process for the production of advanced planar wire grid plates as detectors for high energy physics experiments
Journal article2001, Sensors and Actuators A, 93, p.76-83Publication Barrier deposition on porous low-k films
Proceedings paper2003, Proceedings of the Advanced Metallization Conference 2002, 1/10/2002, p.829-833Publication Barrier process development for damascene integration of porous SiLK resin films
Proceedings paper2002, Advanced Metallization Conference 2001, 9/10/2001, p.307-311Publication Barrier studies on porous silk semiconductor dielectric
Journal article2003, Microelectronic Engineering, (70) 2_4, p.352-357Publication Barriers for Cu/low k damascene structures
Journal article2001, Semiconductor Fabtech, 14, p.189-191Publication Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Oral presentation2002, MRS Fall Meeting Symposium B: Polymer/Metal Interfaces - Fundamentals, Properties, and ApplicationsPublication Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Proceedings paper2003, Polymer/Metal Interfaces and Defect Mediated Phenomena in Ordered Polymers, 2/12/2002, p.383-388Publication Calculation of the Au-Ge phase diagram for nanoparticles
Journal article2008, Archives of Metallurgy and Materials, (53) 4, p.1133-1139Publication Calculation of thermodynamic equilibrium conditions between a liquid nanoparticle and a solid nanowires
Proceedings paper2009, European Congress and Exhibition on Advanced Materials and Processes - Euromat, 7/09/2009Publication Challenges for structural stability of ultra-low-k based interconnects
Journal article2004, Microelectronic Engineering, (75) 1, p.54-62Publication Challenges in the implentation of low-k dielectrics in the back-end of line
Journal article2005, Microelectronic Engineering, 80, p.337-344Publication Challenges of clean/strip processing for Cu/LowK technology
; ; ; Proceedings paper2004, Proceedings of the IEEE International Interconnect Technology Conference - IITC, 7/06/2004, p.187-189Publication Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109
Journal article2002, Microelectronic Engineering, (64) 1_4, p.25-33Publication Characterisation of JSR's spin-on hardmask FF-02
Journal article2003, Microelectronic Engineering, (70) 2_4, p.308-313