Browsing by Author "Ike, Shinichi"
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Publication Epitaxial GeSn: Impact of process conditions on material quality
; ; Publication Epitaxial GeSn: Impact of process conditions on material quality
; ; Publication Epitaxial GeSn: impact of process conditions on material quality
Meeting abstract2018-05, Joint ISTDM/ICSI Conference, 27/05/2018, p.195-196Publication Group IV Epi processing, evolution in CMOS from 90 to 10nm node
Proceedings paper2014, ASM 2014 Users Meeting, 25/09/2014Publication Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects
Journal article2016, Japanese Journal of Applied Physics, (55) 4S, p.04EJ11Publication Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects
Proceedings paper2015, International Conference on Solid State Devices and Materials - SSDM, 27/09/2015, p.G4.4Publication Influence of precursor gas source on defect properties in Si1xGex epitaxial thin films
Meeting abstract2015, Meeting in the Division of Crystals Science and Technology of JSAP (Japan Society of Applied Physics), 29/10/2015Publication Introduction of Sn into GeSn based group-IV thin films and its impacts
Publication Structural and electrical properties of low temperature CVD-grown SiGe epitaxial layers
Meeting abstract2016, 9th International Workdhop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically, 11/01/2016