Browsing by Author "Kenens, Bart"
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Publication Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Integrating 8nm Self-Aligned Tip-to-Tip to Enable 4-track Standard Cell Architecture as Scaling Booster
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication LiveCell SERS endoscopy using plasmonic nanowire waveguides
Publication Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Towards Enabling Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic: Fabrication, Characterization and Electrical Measurements of Superconducting NbxTi(1-x)N
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Two-level Semi-damascene interconnect with fully self-aligned Vias at MP18
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Visualization of molecular fluorescence point spread functions via remote excitation switching fluorescence microscopy