imec Institutional Repository Browsing {{ collection }} by Author "Kurchikov, K."

Publication

1-D model of OSG low-k films modification by EUV/VUV emission

Rakhimova, T.V.

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Rakhimov, A.T.

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Mankelevich, Y.A.

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Lopaev, D.V.

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Ziryanov, S.M.

;

Kovalev, A.S.

Meeting abstract

2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013

Publication

Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature

Lopaev, D

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Rakhimova, T

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Mankelevich, Y

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Kurchikov, K.

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Zyryanov, S.

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Zotovich, A.

Meeting abstract

2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015

Publication

F atoms interaction with nanoporous OSG low-k materials

Rakhimova, T.

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Rakhimov, A.

;

Zyryanov, S.

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Lopaev, D.

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Mankelevich, Y.

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Proshina, O.

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Novikova, N.

Meeting abstract

2014, MRS Spring Meeting Symposium CC: New Materials and Processes for Interconnects, Novel Memory and Advanced Display Technologies, 15/03/2014, p.CC1.03-283

Publication

Interaction of F atoms with SiCOH ultra low-k films. Part I: Fluorination and damage

Rakhimova, T.

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Lopaev, D.

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Mankelevich, Y.

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Rakhimov, A.

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Zyryanov, S.

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Kurchikov, K.

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Novikova, N.

Journal article

2015, Journal of Physics D: Applied Physics, (48) 17, p.175203

Publication

Interaction of F atoms with SiCOH ultra low-k films. Part II: Etching

Rakhimova, T.

;

Lopaev, D.

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Mankelevich, Y.

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Kurchikov, K.

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Zyryanov, S.

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Palov, A.P.

Journal article

2015, Journal of Physics D: Applied Physics, (48) 17, p.175204

Publication

Low-k films modification under EUV and VUV radiation

Rakhimova, T.

;

Rakhimov, A.

;

Mankelevich, Y.A.

;

Lopaev, D.V.

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Kovalev, A.S.

;

Vasil'eva, A.N.

Journal article

2014, Journal of Physics D: Applied Physics, (47) 2, p.25102

Publication

Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach

Zotovich, Alexey

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Rezvanov, Askar

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Chanson, Romain

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Zhang, L.

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Hacker, N.

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Kurchikov, K.

Journal article

2018, Journal of Physics D: Applied Physics, (51) 32, p.325202

Publication

Modification of OSG based low-k films under EUV and VUV exposure

Rakhimova, T.

;

Rakhimov, A.

;

Mankelevich, Y.

;

Lopaev, D.

;

Kovalev, A.

;

Vasil'eva, A.

;

Proshina, O.

Journal article

2013, Applied Physics Letters, 102, p.111902

Browsing by Author "Kurchikov, K."