Browsing by Author "Kuwahara, Yuhei"
- Results Per Page
- Sort Options
Publication Advances and challenges in dual-tone development process optimization
Proceedings paper2009, Optical Microlithography XXII, 22/02/2009, p.72740IPublication Advances in dual-tone development for pitch frequency doubling
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.76400EPublication Approaches to Enable Patterning of Tight Pitches towards High NA EUV
Publication Dry development rinse process for ultimate resolution Improvement via pattern collapse mitigation
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.942516Publication EUV Metal Oxide Resist Development Technology for Improved Sensitivity, Roughness and Pattern Collapse Margin for High Volume Manufacturing
Publication EUV patterning improvement toward high-volume manufacturing
Meeting abstract2015, Extreme Ultraviolet (EUV) Lithography VI, 22/02/2015, p.94221XPublication EUV process establishment through litho and etch for N7 node
Proceedings paper2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.97760CPublication Finite element modeling of PAG leaching and water uptake in immersion lithography resist materials
Proceedings paper2008, Advances in Resist Materials and Processing Technology XXV, 24/02/2008, p.692315Publication Manufacturability improvements in EUV resist processing towards NXE:3300 processing
Proceedings paper2014, Advances in Patterning Materials and Processes XXXI, 23/02/2014, p.905108Publication Novel metal containing resists for EUV lithography extendibility
Proceedings paper2016, Extreme Ultravioelt (EUV) Lithography, 21/02/2016, p.977606Publication Recent advances in EUV patterning in preparation towards high-NA EUV
Proceedings paper2023, Conference on Advances in Patterning Materials and Processes XL, FEB 27-MAR 01, 2023, p.Art. 124981GPublication Resist fundamentals for resolution, LER and sensitivity (RLS) performance tradeoffs and their relation to micro-bridging defects
Proceedings paper2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.727347