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Browsing by Author "Li, Zilan"

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    Effective metal gate work function modification by ion implantation with W-based gate stack

    Li, Zilan
    ;
    Schram, Tom  
    ;
    Kerner, Christoph  
    ;
    Witters, Thomas  
    ;
    Singanamalla, Raghunath
    Oral presentation
    2008, 5th International Symposium on Advanced Gate Stack Technology
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    Energy band-alignment of a multimetal-layer gated metal-oxide-semiconductor structure

    Li, Zilan
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    Houssa, Michel  
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    Schram, Tom  
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    De Gendt, Stefan  
    ;
    De Meyer, Kristin  
    Journal article
    2009, Applied Physics Letters, (95) 18, p.183506
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    Flat-band voltage shift of Ruthenium gated stacks and its link with the formation of a thin Ruthenium oxide layer at the Ruthenium/dielectric interface

    Li, Zilan
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    Schram, Tom  
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    Pantisano, Luigi
    ;
    Stesmans, Andre  
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    Conard, Thierry  
    ;
    Shamuilia, Sheron
    Journal article
    2007-02, Journal of Applied Physics, (101) 3, p.34503
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    Forming gas anneal induced flat-band voltage shift of metal-oxide-semiconductor stacks and its link with hydrogen incorporation in metal gates

    Li, Zilan
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    Schram, Tom  
    ;
    Pantisano, Luigi
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    Witters, Thomas  
    ;
    Stesmans, Andre  
    ;
    Akheyar, Amal
    Journal article
    2007, Microelectronic Engineering, (84) 9_10, p.2213-2216
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    Influence of metal capping layer on the work function of Mo gated metal-oxide semiconductor stacks

    Li, Zilan
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    Schram, Tom  
    ;
    Stesmans, Andre  
    ;
    Franquet, Alexis  
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    Witters, Thomas  
    ;
    Pantisano, Luigi
    Journal article
    2008, Applied Physics Letters, (93) 8, p.83511
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    Investigation on molybdenum and its conductive oxides as p-type metal gate candidates

    Li, Zilan
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    Schram, Tom  
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    Witters, Thomas  
    ;
    Cho, Hag-Ju
    ;
    O'Sullivan, Barry  
    ;
    Hooker, Jacob
    Proceedings paper
    2007, Physics and Technology of High-k Dielectrics, 7/10/2007, p.575-583
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    Investigation on molybdenum and its conductive oxides as p-type metal gate candidates

    Li, Zilan
    ;
    Schram, Tom  
    ;
    Witters, Thomas  
    ;
    Cho, Hag-Ju
    ;
    O'Sullivan, Barry  
    ;
    Yamada, Naoki
    Journal article
    2008, Journal of the Electrochemical Society, (155) 7, p.H481
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    Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks

    Li, Zilan
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    Schram, Tom  
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    Pantisano, Luigi
    ;
    Stesmans, Andre  
    ;
    Conard, Thierry  
    ;
    Shamuilia, Sheron
    Journal article
    2007, Microelectronics Reliability, (47) 4_5, p.518-520
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    Metal gate work function control for advanced MOSFET applications

    Li, Zilan
    PHD thesis
    2009-09
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    Oxygen incorporation in TiN for metal gate work function tuning with a replacement gate integration approach

    Li, Zilan
    ;
    Schram, Tom  
    ;
    Witters, Thomas  
    ;
    Tseng, Joshua
    ;
    De Gendt, Stefan  
    ;
    De Meyer, Kristin  
    Journal article
    2010, Microelectronic engineering, 87, p.1805-1807
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    Substrate transfer of GaN-LED on 200mm Si wafer

    Pham, Nga  
    ;
    Rosmeulen, Maarten  
    ;
    Li, Zilan
    ;
    Sabuncuoglu Tezcan, Deniz  
    ;
    Osman, Haris  
    Proceedings paper
    2013, Electronics Packaging Technology Conference - EPTC, 11/12/2013
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    Surface termination of HfO2 in W/HfO2 gated metal-oxide-semiconductor stacks from thermal stability point of view

    Li, Zilan
    ;
    Pourtois, Geoffrey  
    ;
    Schram, Tom  
    ;
    De Gendt, Stefan  
    ;
    De Meyer, Kristin  
    Oral presentation
    2008, 5th International Symposium on Advanced Gate Stack Technology
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    Ultra low-EOT (5 Å) gate-first and gate-last high performance CMOS achieved by gate-electrode optimization

    Ragnarsson, Lars-Ake  
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    Li, Zilan
    ;
    Tseng, Joshua
    ;
    Schram, Tom  
    ;
    Rohr, Erika
    ;
    Cho, Moon Ju
    Proceedings paper
    2009, IEEE International Electron Devices Meeting - IEDM, 7/12/2009, p.663-666

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