Browsing by Author "Lin, Guanyang"
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Publication Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Meeting abstract2014, Micro and Nano Engineering Conference - MNE, 22/09/2014Publication Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
Journal article2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31204Publication Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Proceedings paper2014, Alternative Lithographic Technologies VI, 24/02/2014, p.904905Publication Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Oral presentation2012, 38th International Conference on Micro and NanoEngineering - MNEPublication Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Oral presentation2012, Conference on Photopolymer Science and TechnologyPublication DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
; ; Publication High throughput grating qualification of directed self-assembly patterns using optical metrology
Oral presentation2013, 39th International Conference on Micro and Nano Engineering - MNEPublication High throughput grating qualification of directed self-assembly patterns using optical metrology
Journal article2014, Microelectronic Engineering, 123, p.175-179Publication Impact of BCP asymmetry on DSA patterning performance
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.943215Publication Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis
Oral presentation2012, FujiFilm Litho WorkshopPublication Implementation of DSA for electrical test vehicles at the 7 nm node
Proceedings paper2015, E-MRS Spring Meeting, 11/05/2015Publication Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Journal article2015, Journal of Vacuum Science and Technology B, (33) 6, p.06F301Publication Influence of film thickness and pattern density in graphoepitaxial DSA
Proceedings paper2015, 1st International Conference on DSA, 26/10/2015Publication Influence of surface energy modification in grapho-epitaxy DSA
Oral presentation2015, 41st International Conference on Micro- and Nanofabrication and Manufacturing Using Lithography and Related TechniquesPublication Influence of template fill in grapho-epitaxy DSA
Proceedings paper2016, Advances in Patterning Materials and Processes XXXIII, 22/02/2016, p.97791GPublication Influence of template fill in graphoepitaxy directed self-assembly
Journal article2016, Journal of Micro/Nanolithography MEMS and MOEMS, (15) 3, p.31603Publication Kinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces
Meeting abstract2014, SPIE Advanced Lithography 2014, 23/02/2014Publication Line Edge Roughness on Directed Self Assembly: Impact of process conditions
Publication Material influences on process performance in chemo-epitaxy directed self-assembly integration
Proceedings paper2013, International Conference on Photopolymer Science and Technology - ICPST-30, 25/06/2013Publication Origin of defect in directed self-assembly of block copolymers using feature multiplication
; ; Lin, GuanyangProceedings paper2013, IEEE Litho Workshop, 11/11/2013