Browsing by Author "List, Scott"
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Publication 157nm resist process performance and integration challenges on a full field scanner
Journal article2004, Journal of Photopolymer Science and Technology, (17) 4, p.655-674Publication A methodology for the characterization of topography induced immersion bubble defects
Proceedings paper2005, Optical Microlithography XVIII, 27/02/2005, p.154-163Publication Advanced metrologies for cleans characterization: ARXPS, GIXF and NEXAFS
Proceedings paper2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.281-284Publication Cu resistivity scaling limits for 20 nm copper damascene lines
Proceedings paper2007, IEEE International Interconnect Technology Conference - IITC, 4/06/2007, p.49-51Publication Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray fluorescence
Journal article2008, Spectrochimica Acta B, (63) 12, p.1359-1364Publication Experimental validation of crosstalk simulations for on-chip interconnects using S-parameters
Publication High performance 3D : a cost benefit analysis
Publication Phase identification of self-forming Cu-Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structures
Journal article2009, Applied Physics Letters, (94) 4, p.42112Publication The third dimension: fact or fiction?
List, ScottOral presentation2005, 3D Architectures for Semiconductor Integration and PackagingPublication Thermo-mechanical properties of thin organosilicate glass films treated by ultra-violet-assisted cure
Journal article2007-02, Acta Materialia, (55) 4, p.1407-1414