Browsing by Author "Luysberg, M."

Dislocation nucleation and movement in helium implanted SiGe/Si(001)Heterostructures studied by in-situ TEM

Fabrication, characterization and modeling of strained SOI MOSFETs with very large effective mobility

He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubbles

Large current enhancement in n-MOSFETs with strained Si on insulator

Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructures

Reduction of silicon dioxide interfacial layer to 4.6 Å EOT by Al remote scavenging in high-j/metal gate stacks on Si

Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing

Strained Si on relaxed SiGe made by ion implantation and strain transfer

Strained Si-on-insulator for advanced CMOS devices

The use of ion implantation and annealing for the fabrication of strained silicon on thin SiGe virtual substrates

Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing

Untersuchung der Anreicherung von Germanium in heliumimplantierten SiGe/Si-Heterostrukturen durch Oxidation

Untersuchung der Heliumimplantation als Schlüsselprozess in der Relaxtion von pseudomorphischen SiGe/Si Heterostrukturen