Browsing by Author "Nagaswami, Venkat"
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Publication Al2O3 surface passivation : electrical characterization using the Quantox tool
Proceedings paper2011, 37th IEEE Photovoltaic Specialists Conference - PVSC, 19/06/2011Publication Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Meeting abstract2014, Micro and Nano Engineering Conference - MNE, 22/09/2014Publication Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.94230MPublication Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Proceedings paper2014, Alternative Lithographic Technologies VI, 24/02/2014, p.904905Publication Defect source analysis of directed self-assembly process
Journal article2013, Journal of Micro/Nanolithography MEMS and MOEMS, (12) 3, p.31112Publication Defect source analysis of directed self-assembly process (DSA of DSA)
Proceedings paper2013, Alternative Lithographic Technologies V, 24/02/2013, p.86800LPublication Inspection of directed self assembly defects
Publication Origin of defect in directed self-assembly of block copolymers using feature multiplication
; ; Lin, GuanyangProceedings paper2013, IEEE Litho Workshop, 11/11/2013Publication Spectroscopic critical dimension technology (SCD) for directed self assembly
Proceedings paper2014, Metrology, Inspection, and Process Control for Microlithography XXVIII, 24/02/2014, p.90502UPublication Surface passivation : layer qualification using Quantox
Proceedings paper2011, 26th European Photovoltaic Solar Energy Conference - EU PVSEC, 5/09/2011, p.1418-1422