Browsing by Author "Nielsen, Peter"
- Results per page
- Sort Options
Publication Electrical characterization of single nanometer-wide Si fins in dense arrays
Journal article2018, Beilstein Journal of Nanotechnology, 9, p.1863-1867Publication Fast micro Hall effect measurements on small pads
Journal article2011, Journal of Applied Physics, (110) 3, p.33707Publication High precision micro-scale Hall effect characterization method using in-line micro four-point probes
Proceedings paper2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.251-255Publication Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions
Proceedings paper2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.135-140Publication In-line sheet resistance measurements of nanometer-wide semiconducting fins
Proceedings paper2017, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 21/03/2017Publication Micro probe carrier profiling of ultra-shallow structures in germanium
Proceedings paper2010, Materials and Devices for End-of-Roadmap and Beyond CMOS Scaling, 5/04/2010, p.1252-I05-20Publication Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures
Proceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009Publication Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C8-C1C14Publication Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe
Journal article2018, Physica Status Solidi A, (215) 6, p.1700857Publication Zero and one-dimensional electrical characterization of nanometer-wide Si fins
Meeting abstract2018, 22nd International Conference on Ion Implantation Technology - IIT, 16/09/2018