Browsing by Author "Peytier, Ivan"

A new technique to fabricate ultra-shallow-junctions, combining in-situ vapour HCl etching and in-situ doped epitaxial SiGe re-growth

A new technique to fabricate Ultra-Shallow-Junctions, combining in-situ vapour HCl etching and in-situ doped epitaxial SiGe re-growth

A successful selective epitaxial Si1-xGex deposition process for HBT-BiCMOS and high-mobility heterojunction pMOS applications

An (un)solvable problem in SIMS: B-interfacial profiling

Carrier illumination as a tool to probe implant dose and electrical activation

Elevated co-silicide for sub-100nm high performance and RF CMOS

Epitaxial thin film solar cells with porous silicon based backside reflector

Polysilicon thin-film solar cells: influence of the deposition rate upon enhanced diffusion and on cell performance

Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS

Successful selective epitaxial Si1-xGex deposition process for HBT-BiCMOS and high-mobility hetero-channel pMOS applications