Browsing by Author "Redzheb, Murad"
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Publication Advanced ultralow-k organosilicate glasses: NEXAFS study
Meeting abstract2015, 16th International Conference on X-ray Absorption Fine Structure - XAFS 16, 23/08/2015, p.VI-0-05Publication Area-selective deposition of low-k materials by means of the sol-gel method
Meeting abstract2018, Materials for Advanced Metallizaiton Conference - MAM, 18/03/2018, p.O6SALDPublication Characterization of advanced k1.9, 2.0 and 2.2 ultra-porous SiOC(H) films deposited by plasma-enhanced chemical vapor deposition
Meeting abstract2014, Conference on Science and Applications of Thin Films - SATF, 15/09/2014Publication Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films
Journal article2016, Applied Physics Letters, (108) 1, p.12902Publication Gemini-templated PMO low-k films
Meeting abstract2016, Materials for Advanced Metallization, 20/03/2016Publication Impact of UV wavelength and curing time on the properties of spin-coated low-k films
Proceedings paper2015, IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM, 19/05/2015, p.99-102Publication Influence of etch process sequence on damage formation in ultra low-k dielectrics
Meeting abstract2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013Publication Laser anneal of oxycarbosilane low-k film
Proceedings paper2016, International Interconnect Technology Conference/ Advanced Metallization Conference, 23/05/2016, p.156-158Publication On the mechanical and electrical properties of self-assembly-based organosilicate porous films
Journal article2017, Journal of Materials Chemistry C, (5) 33, p.8599-8607Publication Periodic mesoporous organosilica films with a tunable steady-state mesophase
Journal article2017, ChemPhysChem, (18) 20, p.2846-2849Publication Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics
Meeting abstract2013, Materials for Advanced Metallization - MAM, 11/03/2013, p.125-126Publication Stress induced densification of thin porous low-k films during nanoindentation
Proceedings paper2018, IEEE International Interconnect Technology Conference - IITC, 4/06/2018, p.118-120Publication Template-dependent hydrophobicity in mesoporous organosilica films
Journal article2018, Microporous and Mesoporous Materials, 259, p.111-115Publication Time-resolved GISAXS investigation of the self-assembly of spin-coated PMO films
Proceedings paper2016, International Materials Research Congress, 14/08/2016Publication Tuning the properties of periodic mesoporous organosilica films for low-k application by Gemini surfactants
Journal article2018, ChemPhysChem, (19) 18, p.2295-2298Publication UV cure of oxycarbosilane low-k films
Journal article2016, Microelectronic Engineering, 156, p.103-107Publication Vacuum-ultraviolet-radiation damage of low-k dielectrics