Browsing by Author "Rezvanov, Askar"

A Novel Volatile Film for Dielectric Plasma Damage Protection

Area selective grafting of siloxane molecules on low-k dielectric with resepct to copper surface

Area-selective grafting of siloxane molecules on low-k dielectric with respect to copper surface

Cryogenic etching of porous low-k dielectrics in CF3Br plasma

Gas phase pore stuffing for the protection of organo-silicate glass dielectric materials

Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials

Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach

Pore surface grafting of porous low-k dielectrics by selective polymers

Pore surface grafting of porous low-k dielectrics by selective polymers

Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics