Browsing by Author "Samara, Vladimir"
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Publication 2D micro-chamber for DC plasma working at low power
Proceedings paper2014, 15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE, 7/04/2014Publication A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring
Journal article2012, Plasma Sources Science and Technology, (21) 6, p.65004Publication Advanced CMOS manufacturing, a drive for plasma science and technology
Proceedings paper2012, 10th Technological Plasma Workshop - TPW, 17/12/2012Publication Characterization of CF3I for low-k material etching
Meeting abstract2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013Publication Development of a novel wafer probe for in-situ measurements
Oral presentation2013, Plasma Technological Workshop UKPublication Development of a novel wafer-probe for in situ measurements of thin film properties
Journal article2015, Plasma Sources Science and Technology, (24) 3, p.32002Publication Etching of low-k materials for microelectronics applications by means of a N2/H2 plasma: Modeling and experimental investigation
Journal article2013, Plasma Sources Science and Technology, (22) 2, p.25011Publication Influence of the ion bombardment of O2 plasmas on low-k materials
Journal article2011, Thin Solid Films, (520) 1, p.464-468Publication Method for in-situ etch uniformity monitoring using plasma emission interferometry
Journal article2015, Journal of Vacuum Science and Technology B, (33) 3, p.31206Publication Modulation of microwave resonance probes
Publication Od pijeska do kompjutera (in Serbian; English: From sand to computer)
Samara, VladimirOral presentation2012, Researchers' Night 2012Publication Planar Langmuir probe in pulsing regime
Meeting abstract2011-05, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM, 5/05/2011Publication Plazma nagrizanje u procesu proizvodnje integralnih kola i nanomasina (eng. Plasma etching for fabrication of integrated circuits and nanodevices)
Samara, VladimirBook chapter2012Publication Resistance and capacitance measurements of the films deposited on a planar Langmuir probe
Proceedings paper2011-11, 64th Gaseous Electronics Conference, 14/11/2011Publication Vacuum ultra-violet emission of CF4 & CF3I containing plasmas and their effect on low-k materials
Journal article2015, Journal of Physics D: Applied Physics, (48) 39, p.395202