Browsing by Author "Spampinato, Valentina"
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Publication 3D analysis of intermetallic formation in blankets and micro-bumps
Proceedings paper2019, Réunion des Utilisateurs Francophones ToF-SIMS - ION TOF, 14/03/2019Publication 3D analysis of intermetallic formation in blankets and micro-bumps.
Oral presentation2019, SIMS 22Publication 50 nm Gate Length FinFET Biosensor & the Outlook for Single-Molecule Detection
Proceedings paper2020, IEEE International Electron Devices Meeting (IEDM), DEC 12-18, 2020Publication A combined SPM/TOFSIMS tool to obtain real chemical 3D information
Meeting abstract2017, 21st International Conference on Secondary Ion Mass Spectrometry - SIMS21, 10/09/2017, p.304Publication A correlative ToF-SIMS/SPM methodology for probing 3D devices
Journal article2020, Analytical Chemistry, (92) 16, p.11413-11419Publication A flexible organic memory device with a clearly disclosed resistive switching mechanism
Journal article2019, Organic Electronics, 64, p.209-215Publication A holistic approach of SIMS analysis for advanced semiconductor structures
Proceedings paper2019, SIMS 22 - 22nd International Conference on Secondary Ion Mass Spectrometry, 20/10/2019Publication A methodology for mechanical stress and wafer warpage minimization during 3D NAND fabrication
Journal article2022, MICROELECTRONIC ENGINEERING, (254) February, p.Art. 111660Publication Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool
Oral presentation2018, SIMS Europe 2018Publication Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Proceedings paper2019, French users meeting ToF-SIMS, 14/03/2019Publication Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Proceedings paper2018, SIMS Europe 2018, 16/09/2018Publication An alternative application of ToF-SIMS/in-situ AFM: controlled sample preparation for IC failure analysis
Oral presentation2019, SIMS 22 - 22nd International Conference on Secondary Ion Mass SpectrometryPublication Applications of smart monomolecular films in IC microelectronics for organic-inorganic interface engineering
Meeting abstract2017, 43rd International Conference on Micro and Nanoengineering - MNE, 18/09/2017Publication Area-Selective Atomic Layer Deposition of TiN Using Trimethoxy(octadecyl)silane as a Passivation Layer
; ; ; Journal article2020, LANGMUIR, (36) 44, p.13144-13154Publication Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment
Journal article2021, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (20) 3, p.031010Publication Characterisation of nanomaterial hydrophobicity using engineered surfaces
Journal article2017, Journal of Nanoparticle Research, 19, p.117Publication Characterization of the conductive structures in the periplasm of cable bacteria using combined TOF-SIMS/AFM
Meeting abstract2018, SIMS Europe 2018, 17/09/2018Publication CNT EUV pellicle tunability and performance in a scanner-like environment
Proceedings paper2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.116090YPublication Co active electrode enhances CBRAM performance and scaling potential
Meeting abstract2019, IEEE ELectron Devices Meeting - IEDM, 7/12/2019, p.851-854Publication [Co/Ni]-CoFeB hybrid free layer stack materials for high density magnetic random access memory applications
Journal article2016, Applied Physics Letters, (108) 13, p.132405