Browsing by Author "Wada, Masayuki"
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Publication Acoustic cleaning in nano-electronics
Proceedings paper2008, Acoustics, 29/06/2008, p.556-560Publication All wet photoresist strip by solvent aerosol spray
Oral presentation2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSSPublication Application of single-wafer wet cleaning prior to epitaxial SiGe process
Journal article2009, Solid State Phenomena, 145-146, p.173-176Publication Cleaning and strip requirements for metal gate based CMOS integration
; ; ; ; Publication Damage cluster analysis of patterned wafers during solvent spray cleaning
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.219-225Publication Damage cluster analysis of patterned wafers during solvent spray cleaning
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2081Publication Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
Journal article2009, Solid State Phenomena, 145-146, p.87-90Publication Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
Meeting abstract2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS, 21/09/2008Publication Effect of chemical growth air filter for wafer storage before epitaxial growth
Proceedings paper2008, SEMATECH Meeting, 31/03/2008Publication Evaluation of post ion-implantation resist strip with the background signal of a light scattering tool
Journal article2010, Japanese Journal of Applied Physics, (49) 5, p.56504Publication High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Oral presentation2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSSPublication High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Journal article2009, Solid State Phenomena, 145-146, p.39-42Publication Impact of galvanic corrosion on metal gate stacks
Oral presentation2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSSPublication Lossless solvent-based extension implant strip
Meeting abstract2009, 216th ECS Meeting, 4/09/2009, p.2076Publication Lossless solvent-based extension implant strip
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.179-186Publication Low temperature pre-epi treatment: critical parameters to control interface contamination
Proceedings paper2008, Nanotechnologies Workshop Covering EC-funded R&D on Characterization, Process Technology and Equipment Assessment, 6/10/2008Publication Low temperature pre-epi treatment: critical parameters to control interface contamination
Journal article2009, Solid State Phenomena, 145-146, p.177-180Publication Low temperature pre-epi treatment: critical parameters to control interface contamination
Proceedings paper2008, 4th International Workshop on New Group IV Semiconductor Nanoelectronics, 25/09/2008, p.21-22Publication Low temperature pre-epi treatment: critical parameters to control interface contamination
Oral presentation2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSSPublication Multiple-Vt FinFET devices through La2O3 dielectric capping
Proceedings paper2008, IEEE International SOI Conference Proceedings, 6/10/2008, p.121-122